调制传递函数(MTF)值是表征碲镉汞(HgCdTe)红外探测器成像性能的重要参数。串音是减小探测器MTF值的主要因素之一。合理的器件结构设计可有效地抑制串音,从而提高器件MTF值。介绍了一种含金属框结构的HgCdTe红外焦平面探测器,该器件可有效吸收横向扩散光生载流子并减小器件的串音干扰。对含金属框结构的器件和无金属框结构的器件进行MTF测试及对比分析。测试结果表明,与无金属框结构的器件相比,含金属框结构的器件的MTF值得到显著提高。

Modulation transfer function (MTF) value is an important parameter to characterize the imaging performance of mercury cadmium telluride (HgCdTe) infrared detector. Crosstalk is one of the major factors which degrade the MTF value of detector. The reasonable device structure design can effectively suppress crosstalk and improve the MTF value of the device. A HgCdTe infrared focal plane detector with metal frame structure is proposed, which can effectively absorb laterally diffused photo-carriers and suppress crosstalk. We also carry out measurement and analysis of the MTF of the detectors with and without metal frame structure. The experimental results indicate that, compared with the detector without metal frame structure, the detector with metal frame structure can effectively increase MTF value of detector.