中国激光, 2018, 45 (5): 0503001, 网络出版: 2018-05-02
基于组分调节减小AZO表面等离子体损耗的研究 
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Research on Reducement of AZO Surface Plasma Loss Based on Composition Adjustment
薄膜 表面等离子体 掺铝氧化锌 光学带隙 光学损耗 电学损耗 thin films surface plasmas Al-doped ZnO optical band gap optical loss electrical loss
摘要
在蓝宝石衬底上制备了具有不同铝(Al)掺杂浓度的掺铝氧化锌(AZO)薄膜, 并对其进行了紫外-可见吸收光谱、霍尔效应、折射率及介电常数测试, 研究了Al组分对AZO薄膜的光电、表面等离子体性质的影响。随着Al组分浓度的逐渐增大, AZO薄膜吸收边发生蓝移且吸收强度逐渐减小, 光学损耗减小;同时, 载流子浓度与迁移率先增大后减小, 而电学损耗先减小后增大。
Abstract
The Al-doped ZnO (AZO) films with different Al doping concentrations are fabricated on the Al2O3 substrates. The effects of Al composition on the photoelectric and surface plasma properties of AZO films are analyzed by the ultraviolet-visible (UV-Vis) absorption spectra, Hall measurement, refractive index and dielectric constant measurements. With the increase of Al composition concentration, the absorption edge is blue-shifted and the absorption intensity decreases gradually ,which means the optical loss is reduced. Meanwhile, the carrier concentration and mobility first increase and then decrease, while the electrical loss first decreases and then increases.
陈子男, 王登魁, 魏志鹏, 方铉, 房丹, 王新伟, 王晓华. 基于组分调节减小AZO表面等离子体损耗的研究[J]. 中国激光, 2018, 45(5): 0503001. Chen Zinan, Wang Dengkui, Wei Zhipeng, Fang Xuan, Fang Dan, Wang Xinwei, Wang Xiaohua. Research on Reducement of AZO Surface Plasma Loss Based on Composition Adjustment[J]. Chinese Journal of Lasers, 2018, 45(5): 0503001.
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