光学学报, 2018, 38 (5): 0512002, 网络出版: 2018-07-10
倾斜波面干涉仪中光纤阵列型点源发生器的光程误差标定方法 下载: 794次
Optical Path Difference Calibration Method of Optical Fiber Array Point Source Generator in Tilted-Wave-Interferometer
测量 点源发生器 光纤阵列 小数重合法 光程差 measurement point source generator fiber array excess fraction method optical path difference
摘要
分析了光纤阵列型点源发生器相对于透镜阵列型点源发生器的优势。针对光纤阵列型点源发生器各光纤出射光束之间存在初始光程差的问题,提出了基于马赫-曾德尔全光纤干涉仪和小数重合法的光程差检测方法。测量各光束间的光程差并将其引入到倾斜波面干涉系统的误差模型中,以消除其对被测件面形偏差解算的影响。结果表明,该检测系统的测量不确定度为0.07λ 3(λ 3=632.8 nm)。分别使用基于光纤阵列的倾斜波面干涉系统和ZYGO干涉仪对抛物面镜片进行测量,二者获得的面形偏差结果一致。
Abstract
The advantages of the optical fiber array point source generator relative to the lens array point source generator are analyzed. An optical path difference detection method based on Mach-Zehnder all-fiber interferometer and excess fraction method is proposed, which can measure the optical path difference of all beams relative to the beam emitted from central fiber. Meanwhile, the measurement influence of optical path difference on surface deviation calculation can be eliminated with introducing it into the mathematical model of tilted-wave-interferometry system. The results show that the measurement uncertainty of this detection system is 0.07λ3(λ3=632.8 nm). A parabolic mirror is measured with fiber array based tilted-wave-interferometry system and ZYGO interferometer, and the surface deviations obtained by the two interferometers are consistent.
李小柳, 沈华, 李嘉, 朱雪妍, 姚德超, 路晴, 朱日宏. 倾斜波面干涉仪中光纤阵列型点源发生器的光程误差标定方法[J]. 光学学报, 2018, 38(5): 0512002. Xiaoliu Li, Hua Shen, Jia Li, Xueyan Zhu, Dechao Yao, Qing Lu, Rihong Zhu. Optical Path Difference Calibration Method of Optical Fiber Array Point Source Generator in Tilted-Wave-Interferometer[J]. Acta Optica Sinica, 2018, 38(5): 0512002.