Chinese Optics Letters, 2018, 16 (5): 050007, Published Online: Jul. 4, 2018  

Fabrication of electrically contacted plasmonic Schottky nanoantennas on silicon

Author Affiliations
1 Department of Electronics, Carleton University, 1125 Colonel By Drive, Ottawa, Ontario K1S 5B6, Canada
2 Centre for Research in Photonics, University of Ottawa, 25 Templeton Street, Ottawa, Ontario K1N 6N5, Canada
3 Department of Electrical, Computer and Software Engineering, University of Ontario Institute of Technology, 2000 Simcoe Street North Oshawa, Ontario L1H 7K4, Canada
4 School of Electrical Engineering and Computer Science, University of Ottawa, 800 King Edward Avenue, Ottawa, Ontario K1N 6N5, Canada
5 Department of Physics, University of Ottawa, 150 Louis Pasteur, Ottawa, Ontario K1N 6N5, Canada
Abstract
We fabricate Schottky contact photodetectors based on electrically contacted Au nanoantennas on p-Si for the plasmonic detection of sub-bandgap photons in the optical communications wavelength range. Based on a physical model for the internal photoemission of hot carriers, photons coupled onto the Au nanoantennas excite resonant plasmons, which decay into energetic “hot” holes emitted over the Schottky barrier at the Au/p-Si interface, resulting in a photocurrent. In our device, the active Schottky area consists of Au/p-Si contact and is very small, whereas the probing pad for external electrical interconnection is larger but consists of Au/Ti/p-Si contact having a comparatively higher Schottky barrier, thus producing negligible photo and dark currents. We describe fabrication that involves an electron-beam lithography step overlaid with photolithography. This highly compact component is very promising for applications in high-density Si photonics.

Mohammad Alavirad, Anthony Olivieri, Langis Roy, Pierre Berini. Fabrication of electrically contacted plasmonic Schottky nanoantennas on silicon[J]. Chinese Optics Letters, 2018, 16(5): 050007.

引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!