基于等离子体再聚合技术制备了纳米纤维—纳米锥双层森林结构,并通过磁控溅射工艺在结构表面引入金属纳米颗粒实现了双层复合纳米森林结构,工艺流程简单便捷,与常规微纳加工工艺兼容性好,易于实现大面积的并行加工.将纳米森林的陷光效应和金属纳米颗粒的表面等离激元效应相结合,对双层复合纳米森林结构的光吸收特性进行深入研究与探索,最终实现了该复合纳米森林结构在1.5~25 μm波长范围内84.1%的平均吸收率.具有宽光谱高吸收光学特性的双层复合纳米森林结构有望在提高红外器件性能和拓展器件应用等方面获得广泛应用.

In this work, nanowire-nanocone double-layer nanoforests are prepared based on a plasma repolymerization technique, and then double-layer hybrid nanoforests are realized by introducing noble metal-nanoparticles on surface of the nanoforests using a magnetron sputtering step. The entire process is simple and fully compatible with conventional micro-fabrication, besides, it is a parallel technique, thus large area fabrication of the hybrid nanoforests is easy to achieve. Moreover, such a hybrid nanoforest is able to combine light trapping effect and surface plasmonic effect thus to achieve an average absorption as high as 84.1% in a broad wavelength range of 1.5~25 μm. With such a broadband high absorption property, the double-layer hybrid nanoforests are expected to be widely used to improve performance of infrared devices, and to expand applications of such devices.