应用激光, 2018, 38 (2): 270, 网络出版: 2018-06-01
飞秒激光加工单晶金刚石锥形阵列的试验研究
Experimental Research on Conical Array of Single Crystal Diamond Based on Femtosecond Laser
摘要
针对单晶金刚石加工难的问题, 采用脉宽为250 fs的飞秒激光器, 开展了不同工艺参数下的单晶金刚石晶体飞秒激光烧蚀试验研究, 同时采用超景深显微镜检测单晶金刚石烧蚀的宽度、深度及表面质量, 研究了激光平均功率、光斑重叠率和扫描次数对单晶金刚石烧蚀深度、宽度及表面质量的影响。结果表明, 飞秒激光成型烧蚀加工单晶金刚石时, 当采用激光平均功率为11.1 W, 光斑重叠率为61.9%, 循环扫描次数为100次作为最佳工艺参数组合时, 能够获得具有较高表面质量的最大烧蚀效率, 通过激光分层成型烧蚀, 在单晶金刚石片上加工出大小、突出高度和排布方式可以精确控制的锥形阵列, 制造出无需结合剂的高品质端面金刚石砂轮。
Abstract
In view of the difficulty in single crystal diamond processing, a femtosecond laser with a pulse width of 250 fs is used. The experimental research on femtosecond laser ablation of single crystal diamond under different process parameters was carried out. The width, depth and surface quality of single crystal diamond ablation were measured by using an ultrasonic microscope. The effects of average laser power, spot overlap ratio and scanning times on ablation depth, width and surface quality of single crystal diamond were investigated. The results show that when the laser average power is 11.1 W, the spot overlap rate is 61.9%, and the cycle scans is 100 times as the best combination of process parameters, the femtosecond laser ablation of single crystal diamond can obtain the maximum ablation efficiency with higher surface quality. Through laser layered forming ablation, precise control of size, protruding height and arrangement manner can be processed on the single crystal diamond wafer, produced a high-quality end-face diamond grinding wheel without binder.
熊彪, 陈根余, 殷赳, 周聪, 胡搒. 飞秒激光加工单晶金刚石锥形阵列的试验研究[J]. 应用激光, 2018, 38(2): 270. Xiong Biao, Chen Genyu, Yin Jiu, Zhou Cong, Hu Bang. Experimental Research on Conical Array of Single Crystal Diamond Based on Femtosecond Laser[J]. APPLIED LASER, 2018, 38(2): 270.