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三层氮化硅减反射膜在单晶硅太阳电池中的应用

Application of Three-Layer Silicon Nitride Antireflection Coatings in Mono-Crystalline Silicon Solar Cells

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摘要

对比了具有双层和三层氮化硅减反射膜的单晶硅太阳电池的反射率、内外量子效率、少子寿命及电学特性, 模拟了双层和三层氮化硅减反射膜的光学特性, 结果表明, 三层氮化硅减反射膜具有更好的减反射效果和输出特性。通过等离子体增强化学气相沉积(PECVD)工艺在P型单晶硅上分别制作了双层和三层氮化硅减反射膜, 对其减反射效果和钝化效果的分析结果表明, 与双层氮化硅减反射膜相比, 三层氮化硅减反射膜具有较小的反射率和较好的钝化效果。对具有双层和三层氮化硅减反射膜的单晶硅太阳电池的电学测试结果表明, 具有三层氮化硅减反射膜的单晶硅太阳电池的转换效率比具有双层氮化硅减反射膜的单晶硅太阳电池的转换效率有所增大。

Abstract

The reflectivity, internal and external quantum efficiency, minority carrier lifetime and electrical characteristics of mono-crystalline silicon solar cells with double-layer and three-layer silicon nitride antireflection coatings are compared. The optical characteristics of double-layer and three-layer silicon nitride antireflection coatings are simulated. The results show that, the three-layer silicon nitride antireflection coating has a better antireflection effect and a better output characteristic. The double-layer and three-layer silicon nitride antireflection coatings are fabricated on P-type mono-crystalline silicon by the plasma enhanced chemical vapor deposition (PECVD) process. The analysis results of their antireflection and passivation effects show that the three-layer silicon nitride antireflection coating has a smaller reflectivity and a better passivation effect compared with the double-layer silicon nitride antireflection coating. The electrical characteristic testing results of the mono-crystalline silicon solar cells with double-layer and three-layer silicon nitride antireflection coatings show that the conversion efficiency of the mono-crystalline silicon solar cells with three-layer silicon nitride antireflection coating is relatively higher than that with double-layer silicon nitride antireflection coating.

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中图分类号:TN36

DOI:10.3788/lop55.061602

所属栏目:材料

基金项目:西藏自治区高校青年教师创新支持计划(QC2015-86)、西藏自治区自然科学基金(XZ2017ZRG-105)

收稿日期:2017-11-07

修改稿日期:2017-12-11

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马新尖:拉萨师范高等专科学校信息技术系, 西藏 拉萨 850000
司志华:拉萨师范高等专科学校信息技术系, 西藏 拉萨 850000
杨东:拉萨师范高等专科学校信息技术系, 西藏 拉萨 850000
林涛:西安理工大学自动化与信息工程学院, 陕西 西安 710048
冯帅臣:扬州鑫晶光伏科技有限公司, 江苏 扬州 225653

联系人作者:马新尖(932594765@qq.com)

备注:马新尖(1985-), 女, 硕士, 讲师, 主要从事半导体光伏电池和器件方面的研究。E-mail: 932594765@qq.com

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引用该论文

Ma Xinjian,Si Zhihua,Yang Dong,Lin Tao,Feng Shuaichen. Application of Three-Layer Silicon Nitride Antireflection Coatings in Mono-Crystalline Silicon Solar Cells[J]. Laser & Optoelectronics Progress, 2018, 55(6): 061602

马新尖,司志华,杨东,林涛,冯帅臣. 三层氮化硅减反射膜在单晶硅太阳电池中的应用[J]. 激光与光电子学进展, 2018, 55(6): 061602

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