对比了具有双层和三层氮化硅减反射膜的单晶硅太阳电池的反射率、内外量子效率、少子寿命及电学特性,模拟了双层和三层氮化硅减反射膜的光学特性,结果表明,三层氮化硅减反射膜具有更好的减反射效果和输出特性。通过等离子体增强化学气相沉积(PECVD)工艺在P型单晶硅上分别制作了双层和三层氮化硅减反射膜,对其减反射效果和钝化效果的分析结果表明,与双层氮化硅减反射膜相比,三层氮化硅减反射膜具有较小的反射率和较好的钝化效果。对具有双层和三层氮化硅减反射膜的单晶硅太阳电池的电学测试结果表明,具有三层氮化硅减反射膜的单晶硅太阳电池的转换效率比具有双层氮化硅减反射膜的单晶硅太阳电池的转换效率有所增大。

The reflectivity, internal and external quantum efficiency, minority carrier lifetime and electrical characteristics of mono-crystalline silicon solar cells with double-layer and three-layer silicon nitride antireflection coatings are compared. The optical characteristics of double-layer and three-layer silicon nitride antireflection coatings are simulated. The results show that, the three-layer silicon nitride antireflection coating has a better antireflection effect and a better output characteristic. The double-layer and three-layer silicon nitride antireflection coatings are fabricated on P-type mono-crystalline silicon by the plasma enhanced chemical vapor deposition (PECVD) process. The analysis results of their antireflection and passivation effects show that the three-layer silicon nitride antireflection coating has a smaller reflectivity and a better passivation effect compared with the double-layer silicon nitride antireflection coating. The electrical characteristic testing results of the mono-crystalline silicon solar cells with double-layer and three-layer silicon nitride antireflection coatings show that the conversion efficiency of the mono-crystalline silicon solar cells with three-layer silicon nitride antireflection coating is relatively higher than that with double-layer silicon nitride antireflection coating.