激光与光电子学进展, 2018, 55 (6): 061204, 网络出版: 2018-09-11
基于直接相位测量术的系统参数标定方法 下载: 1450次
Calibration of System Parameters Based on Direct Phase Measuring Deflectometry
测量 条纹反射 镜面物体测量 系统参数标定 直接相位测量术 measurement fringe reflection specular surface measurement system parameter calibration direct phase measuring deflectometry
摘要
基于条纹反射的相位测量术被广泛用于获取镜面物体的表面三维形貌数据,系统标定是相位测量术中重要的一步,它直接决定了测量结果的精度。提出一种基于相位信息获得系统模型中未知参数的方法,建立相位和深度间的直接关系,并对比了采用相位信息和传统几何特征标识点棋盘格标定显示屏外部参数的准确度,证明了在离焦状态下,采用相位信息的方法具有更高的精度。使用标定好的系统测量了一个凹面镜和一个具有不连续反射表面的台阶工件,得到系统测量结果的误差约为22 μm。实验结果表明所提方法可以精确地标定系统参数,并能获得高精度的三维测量数据。
Abstract
Phase measuring deflectometry (PMD) based on fringe reflection has been widely studied as a way of obtaining three-dimensional shape of specular objects. System calibration is an important step, and it determines the accuracy of the measurement results. We propose a calibration method to obtain the system parameters based on phase information. As a result, it can build the relationship between the absolute phase map and depth data. A contrast experiment is done for verification about extrinsic parameters of the LCD screen by phase data and the checkerboard. The experiment shows that the method using phase data is more accurate when images are out of focus. Using the calibration system, we test a concave mirror and an artificial specular step with discontinuous reflective surface, and the error is about 22 μm. Experiment results show that the proposed method can precisely determine the system parameters, so that 3D shape of specular objects can be measured with a high accuracy.
邓小婷, 高楠, 张宗华. 基于直接相位测量术的系统参数标定方法[J]. 激光与光电子学进展, 2018, 55(6): 061204. Xiaoting Deng, Nan Gao, Zonghua Zhang. Calibration of System Parameters Based on Direct Phase Measuring Deflectometry[J]. Laser & Optoelectronics Progress, 2018, 55(6): 061204.