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Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature

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Abstract

We have designed and realized an athermal 4-channel wavelength (de-)multiplexer in silicon nitride (SiN). Minimized thermal sensitivity is achieved in a wide wavelength range by using wide and narrow waveguides with low and different thermal-optic coefficients in the two arms of Mach–Zehnder interferometers (MZIs). The SiN core layer and SiO2 cladding layers are deposited by a low-temperature plasma-enhanced chemical vapor deposition process. The fabricated MZI filter exhibits a thermal sensitivity within ±2.0 pm/°C in a wavelength range of 55 nm to near 1300 nm. Then, an athermal (de-)multiplexer based on cascaded MZIs has been demonstrated with a crosstalk ≤?22 dB and a thermal sensitivity <4.8 pm/°C for all four channels, reduced by 77% compared to a conventional SiN (de-)multiplexer. Owing to the passive operation and compatibility with the CMOS backend process, our devices have potential applications in 3D integration of photonics and electronics.

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DOI:10.1364/prj.6.000686

基金项目:863 Program (2015AA016904); National Natural Science Foundation of China (NSFC)10.13039/501100001809 (61335002, 11574102, 61675084, 61775094).

收稿日期:2018-02-01

录用日期:2018-04-19

网络出版日期:2018-04-29

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Shiqi Tao:Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
Qingzhong Huang:Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, Chinae-mail: huangqz@mail.hust.edu.cn
Liangqiu Zhu:Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
Jun Liu:Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
Yinglu Zhang:Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
Ying Huang:Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
Yi Wang:Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
Jinsong Xia:Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, Chinae-mail: jsxia@hust.edu.cn

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引用该论文

Shiqi Tao, Qingzhong Huang, Liangqiu Zhu, Jun Liu, Yinglu Zhang, Ying Huang, Yi Wang, and Jinsong Xia, "Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature," Photonics Research 6(7), 686-691 (2018)

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