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Five-port beam splitter of a single-groove grating

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Abstract

A single-groove grating for five-port TE-polarization beam splitting under normal incidence at the wavelength of 1550 nm is presented. The transmitted diffraction efficiency of the gratings is over 94.5% with uniformity better than 2%. A physical view of diffraction inside the grating is presented by the simplified modal method (SMM). Initial parameters of the grating profiles are obtained by use of SMM and then optimized by employing rigorous coupled-wave analysis and the simulated annealing algorithm.

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DOI:10.3788/col201816.070501

所属栏目:Diffraction and gratings

基金项目:The authors acknowledge the support of the Shanghai Science and Technology Committee (Nos. 15JC1403500 and 16DZ2290102) and the Chinese Academy of Sciences (No. QYZDJ-SSW-JSC014).

收稿日期:2018-01-05

录用日期:2018-05-14

网络出版日期:2018-06-28

作者单位    点击查看

Changcheng Xiang:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, China
Changhe Zhou:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Wei Jia:Institute of Photonics Technology, Jinan University, Guangzhou 510632, China
Jun Wu:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

联系人作者:Changhe Zhou(chazhou@mail.shcnc.ac.cn)

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引用该论文

Changcheng Xiang, Changhe Zhou, Wei Jia, Jun Wu, "Five-port beam splitter of a single-groove grating," Chinese Optics Letters 16(7), 070501 (2018)

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【1】Juyou Du, Fengzhao Dai, Yang Bu, Xiangzhao Wang. Calibration method of overlay measurement error caused by asymmetric mark. Applied Optics, 2018, 57(33): 9814 

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