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基于Zemax仿真的激光追踪测量光学系统能量分析

Zemax Simulation Based Energy Analysis of Optical System for Laser Tracking Measurement

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摘要

为满足精密测量领域精度高、可靠性强、实时性好的测量要求, 提出一种基于Zemax仿真的激光追踪测量光学系统能量分析方法。根据激光追踪测量光学系统原理, 建立激光追踪测量光学系统能量模型, 利用Zemax仿真分析非理想光学元件对光学系统能量的影响。仿真结果表明, 干涉分光镜的分光比为5∶5且追踪分光镜的分光比为7∶3时, 四路干涉信号能量接近, 条纹对比度达到0.89, 干涉效果最好。偏振分光镜反射率在非理想条件下, 四路干涉信号的条纹对比度会下降。偏振分光镜透射率在非理想条件下不影响四路干涉信号的条纹对比度。该研究对激光追踪测量系统的精度提升、可靠性评估、光学系统设计和光学元件选择具有指导意义。

Abstract

In order to realize real-time measurement with high precision and high reliability, we propose a Zemax simulation based energy analysis method of optical system for laser tracking measurement. Based on the principle of optical system for laser tracking measurement, the energy model is established. The influence of non-ideal optical elements on the energy of optical system is analyzed by Zemax simulation. The simulation results show that the best interference pattern is obtained when the interference beam split ratio is 5∶5 and the tracking beam split ratio is 7∶3. In this situation, the interference signals from the four receivers have close energy, and the visibility of fringe pattern reaches 0.89. The visibility of fringe pattern of the four received interference signals will degrade when the reflectivity of polarization beam splitters is under non-ideal conditions. The non-ideal transmittance of the polarization beam splitters does not affect the visibility of fringe pattern. The research is useful for the laser tracking measurement system, mainly in terms of precision improvement, reliability evaluation, optical system design, and optical element selection.

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中图分类号:TH71

DOI:10.3788/cjl201845.0704009

所属栏目:测量与计量

基金项目:国家重大科学仪器设备开发专项(2013YQ17053904)、北京市自然科学基金(3182005)、国家自然科学基金(51635001)

收稿日期:2018-03-01

修改稿日期:2018-03-15

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作者单位    点击查看

陈洪芳:北京工业大学,北京市精密测控技术与仪器工程技术研究中心, 北京 100124
汤亮:北京工业大学,北京市精密测控技术与仪器工程技术研究中心, 北京 100124
孙衍强:北京工业大学,北京市精密测控技术与仪器工程技术研究中心, 北京 100124
石照耀:北京工业大学,北京市精密测控技术与仪器工程技术研究中心, 北京 100124
赵晓飞:工业和信息化部计算机与微电子发展研究中心(中国软件评测中心), 北京 100048

联系人作者:陈洪芳(hfchen@bjut.edu.cn)

备注:陈洪芳(1980-), 女, 博士, 副教授, 硕士生导师, 主要从事精密测量技术与仪器、激光干涉测量与信号处理方面的研究。E-mail: hfchen@bjut.edu.cn

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引用该论文

Chen Hongfang,Tang Liang,Sun Yanqiang,Shi Zhaoyao,Zhao Xiaofei. Zemax Simulation Based Energy Analysis of Optical System for Laser Tracking Measurement[J]. Chinese Journal of Lasers, 2018, 45(7): 0704009

陈洪芳,汤亮,孙衍强,石照耀,赵晓飞. 基于Zemax仿真的激光追踪测量光学系统能量分析[J]. 中国激光, 2018, 45(7): 0704009

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