光学与光电技术, 2018, 16 (3): 84, 网络出版: 2018-07-31
利用小周期蛾眼结构提高红外材料抗反射特性的研究
Study on the Improvement of Antireflective Performance of Infrared Materials by Using Small Periodic Moth-Eye Structures
严格耦合波分析 蛾眼 小周期微纳结构 反射率 抗反射特性 RCWA moth-eye small periodic micro-nanostructures reflectivity antireflective performance
摘要
在亚波长区(λ/n<Λ<λ)具有较低反射率和零级透射率,然而在小周期区(Λ<λ/n)具有低反射率和透射率。因此,基于严格耦合波分析(RCWA)理论,以硅基底仿生小周期蛾眼微纳结构为例,设计并分析了针对该结构反射率及透射率的影响因素,如占空比、刻蚀深度、周期等,并给出了最优化参数组合。在制作过程中采用电子束刻蚀及剥离技术进行掩模图形的光刻,然后经过反应离子刻蚀得到所需深度。最后,应用原子力显微镜进行结构形貌表征,红外光谱仪测试得到该结构反射率在7%左右,透射率约为69%~93%。
Abstract
It characterizes low reflectivity and low zeroth-order transmissivity in the sub-wavelength region(λ/n<Λ<λ), which contrasts the low reflectivity and transmissivity in small periodic region(Λ<λ/n).So, based on rigorous coupled-wave analysis(RCWA) theory, in case of bionic moth-eye micro-nanostructure with small periodic on Si surface is designed.Then it analyzes what impact on reflectivity and transmissivity that structure parameters produced, such as array period, duty cycle and thickness and so on. The results get the ideal optimized parameter groups.The lithography of the mask pattern is made by the electron beam etching and liftoff technique in the fabrication process, and the required depth is after than obtained by reactive ion etching(RIE).In summary, atomic force microscope(AFM) is used to characterize the structure and morphology.The results confirm that the reflectivity of the infrared spectrometer is about 7% and transmissivity of that is about 69%~93%.
董亭亭, 陈驰, 王海涛, 耿安兵, 付跃刚. 利用小周期蛾眼结构提高红外材料抗反射特性的研究[J]. 光学与光电技术, 2018, 16(3): 84. DONG Ting-ting, CHEN Chi, WANG Hai-tao, GENG An-bing, FU Yue-gang. Study on the Improvement of Antireflective Performance of Infrared Materials by Using Small Periodic Moth-Eye Structures[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2018, 16(3): 84.