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Robust and accurate terahertz time-domain spectroscopic ellipsometry

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Abstract

In this work, we show how fiber-based terahertz systems can be robustly configured for accurate terahertz ellipsometry. To this end, we explain how our algorithms can be successfully applied to achieve accurate spectroscopic ellipsometry with a high tolerance on the imperfect polarizer extinction ratio and pulse shift errors. Highly accurate characterization of transparent, absorptive, and conductive samples comprehensively demonstrates the versatility of our algorithms. The improved accuracy we achieve is a fundamental breakthrough for reflection-based measurements and overcomes the hurdle of phase uncertainty.

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DOI:10.1364/prj.6.000768

基金项目:Research Grants Council of Hong Kong (415313, 14205514, 14201415); Royal Society10.13039/501100000288 (Wolfson Merit Award).

收稿日期:2018-04-20

录用日期:2018-05-18

网络出版日期:2018-05-21

作者单位    点击查看

Xuequan Chen:Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, China
Edward P. J. Parrott:Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, China
Zhe Huang:School of Science, Zhejiang University of Science and Technology, Hangzhou 310023, China
Hau-Ping Chan:Department of Electronic Engineering, City University of Hong Kong, Kowloon, N.T., Hong Kong, China
Emma Pickwell-MacPherson:Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong, ChinaDepartment of Physics and Astronomy, Warwick University, Coventry, UK

联系人作者:Emma Pickwell-MacPherson(e.pickwell.97@cantab.net)

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引用该论文

Xuequan Chen, Edward P. J. Parrott, Zhe Huang, Hau-Ping Chan, and Emma Pickwell-MacPherson, "Robust and accurate terahertz time-domain spectroscopic ellipsometry," Photonics Research 6(8), 768-775 (2018)

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