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Model-based adaptive non-null interferometry for freeform surface metrology

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Abstract

A model-based adaptive non-null interferometry (MANI) is proposed for steep optical freeform surfaces in situ testing. The deformable mirror (DM) affording the flexible compensation is monitored with the beam in the interferometer by a wavefront sensor. The residual wavefront aberration in the non-null interferogram is eliminated by the multi-configuration ray tracing algorithm based on the system model, especially the DM surface model. The final figure error can be extracted together with the surface misalignment aberration correction. Experiments proving the feasibility of the MANI are shown.

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DOI:10.3788/col201816.081203

所属栏目:Instrumentation, measurement and metrology

基金项目:This work was supported by the National Natural Science Foundation of China (No. 61705002), the Opening Project of Key Laboratory of Astronomical Optics & Technology in Nanjing Institute of Astronomical Optics & Technology of Chinese Academy of Sciences (No. CAS-KLAOT-KF201704), and the Doctoral Start-up Foundation of Anhui University (No. J01003208). Also, this work was partially supported by the National Natural Science Foundation of China (No. 61675005) and the National Key R&D Program of China (No. 2016YFC0301900).

收稿日期:2018-03-01

录用日期:2018-06-25

网络出版日期:2018-07-27

作者单位    点击查看

Lei Zhang:Key Laboratory of Opto-Electronic Information Acquisition and Manipulation, Ministry of Education, Anhui University, Hefei 230601, China
Sheng Zhou:Key Laboratory of Opto-Electronic Information Acquisition and Manipulation, Ministry of Education, Anhui University, Hefei 230601, China
Dong Li:Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
Jingsong Li:Key Laboratory of Opto-Electronic Information Acquisition and Manipulation, Ministry of Education, Anhui University, Hefei 230601, China
Benli Yu:Key Laboratory of Opto-Electronic Information Acquisition and Manipulation, Ministry of Education, Anhui University, Hefei 230601, China

联系人作者:Lei Zhang(optzl@ahu.edu.cn)

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引用该论文

Lei Zhang, Sheng Zhou, Dong Li, Jingsong Li, Benli Yu, "Model-based adaptive non-null interferometry for freeform surface metrology," Chinese Optics Letters 16(8), 081203 (2018)

CrossRef返回数据

【1】Shuai Xue, Shanyong Chen, Guipeng Tie. Near-null interferometry using an aspheric null lens generating a broad range of variable spherical aberration for flexible test of aspheres. Optics Express, 2018, 26(24): 31172 

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