零件表面形貌是工件在不同加工过程中形成的结果。通过对表面疵病宏观与微观形貌研究,以实现对加工过程中产生疵病源头准确定位与控制。依据超光滑表面疵病特点,提出了有针对性的疵病两步测量法,设计了激光辅助显微镜检测设备检测疵病的形状、位置及方向等宏观特征;再采用白光干涉仪和原子力显微镜对这一疵病进行了深入的微观形貌检测,实现了对最大深度0.1 μm疵病的检测。两步测量法可以有效地控制并检测超光滑表面的疵病。

The super-smooth surface morphology reflects the machining process. The source of the defects can be detected and controlled exactly by research on the surface defects of the macroscopic. According to the characteristics of ultra-smooth polishing surface defects, the two-step measurement method is proposed. The equipment of laser assisted detection microscope which located the geometric of defects is designed. The white-light interferometer and AFM are used to detect the defects deeply. Two-step measurement method can realize defects measure depth by 0.1 μm. It can control and detect the defects of ultra-smooth surface effectively.