Fabrication of a large-aperture continuous phase plate in two modes using atmospheric pressure plasma processing
In order to fabricate a large-aperture continuous phase plate (CPP) using atmospheric pressure plasma processing (APPP) with high efficiency and precision, the position dwell mode and velocity mode were proposed and the iterative calculation method was developed for the non-constant removal rate. Two 320 mm × 320 mm × 2 mm CPPs were fabricated with two processing modes. The experiment results show that the velocity mode is capable of significantly reducing the processing time and shape error. The total processing time is decreased from 13.2 h to 9.3 h, and the surface shape error is decreased from 0.158λ to 0.119λ (λ = 632.8 nm) (root mean square).
基金项目：This work was supported by the National Natural Science Foundation of China (No. 51175123) and the National Science and Technology Major Project (No. 2013ZX04006011-205).
Longguang Xia：Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
Kan Liu：Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
Peng Zhang：Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
Ping Li：Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
Runchang Zhao：Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
Bo Wang：Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
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