腔增强吸收光谱技术具有实验装置相对简单、灵敏度高、环境适应性强等特点, 是高灵敏吸收光谱技术的重要组成部分。随着半导体材料和封装工艺的发展, 腔增强吸收光谱技术在光路结构、光源选择、以及与其他光谱技术的联合应用方面有了极大的改进和拓展, 在环境监测、医疗诊断、**建设、工业生产等领域有广阔的应用前景。对腔增强吸收光谱技术的研究现状、发展趋势、应用领域等方面进行详细的论述, 从腔增强吸收光谱技术的基本物理原理出发, 基于不同的光源描述常见的实验配置, 其次对改进光路几何结构的系统性能进行相关分析研究,此外概述了腔增强光谱技术与其他技术的联用情况, 并总结了目前该技术在不同领域的应用, 最后对各装置的发展前景进行了展望。

Cavity enhanced absorption spectroscopy (CEAS) technology is an important part of high sensitive spectroscopy, which has the advanced characteristics of relatively simple apparatus, high sensitivity, and strong environmental adaptability. With the development of semiconductor materials and packaging technology, CEAS has been greatly improved in the light path structure, light source selection, and combined application with other spectral technologies. It has been widely used in the fields of environmental monitoring, medical diagnosis, national defense construction, industrial production, and other fields. The research status, development trend, and application fields of CEAS are discussed in detail. Starting from the CEAS basic physical principles, we describe the common experimental configurations based on different light sources, and analyze the improvement of system performance by improving the geometrical structure of the optical path. In addition, the present combined application of CEAS with other technologies in different fields is summarized. Finally, the future developments of each CEAS device are prospected.