过去几十年中, 短波红外 InGaAs探测器被广泛用于近红外探测系统中, 通过将 InGaAs光电探测器与纳米光天线结合可以增强光吸收并提高量子效率。然而, 这种纳米光天线往往由聚焦离子束或电子束光刻制备而成, 制备成本较高。本文介绍了一种更经济的沉积法来制备纳米光天线。用沉积法制备了纳米 Ag颗粒阵列, Ag球平均半径为 200 nm。研究了 Ag纳米球阵列的表面等离子体效应对 InGaAs光电探测器光吸收性能的影响, 发现在整个近红外波段, InGaAs光电探测器帽层的透过率均显著提高。并且发现 SiO2涂层激发了局域表面等离子体共振, 分析了其对波长 1 .m附近的入射光的透过率增强效应。

Over the past few decades, the InP-based InGaAs photodetector has become an ideal choice for near-infrared detection systems. A possible way to increase its light absorption and quantum efficiency is by combining InGaAs photodetectors with optical nano-antennas. However, thes enano-antennas are usually prepared by focal-ion- or electron-beam lithography, which are time-consuming and costly processes. In this paper, we introduce an economical deposition method to fabricate optical nano-antennas. A Ag nanoparticle array, with 200 nm average radius, was obtained by deposition. The applicability of local surface plasmas to Ag nanoparticles for improving the absorbance of InP-based InGaAs photodetectors was investigated. The transmittance of the cap layer of the InGaAs photodetector was enhanced over almost the entire near-infrared spectrum. The enhancement of the transmittance near the 1.m wavelength was also analyzed. It was found that a SiO2 coating stimulates the local surface-plasmon resonance.