首页 > 论文 > Chinese Optics Letters > 16卷 > 10期(p:101201)

Absolute surface form measurement of flat optics based on oblique incidence method

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

Abstract

In this Letter, a test method based on oblique incidence is practically implemented in the interferometric measurement process. Three sets of wavefront data are achieved through cavity interference measurement with a Fizeau interferometer and one oblique incidence measurement. An iterative algorithm is applied to retrieve the absolute surface shape of the test flat. By adding two sets of measurements, the absolute surface error of the interferometer’s reference flat can be obtained. The new method can not only calibrate the reference flat error of interferometer, but also provide the absolute measurement method for high precision optical components applied in high power laser systems.

Newport宣传-MKS新实验室计划
补充资料

DOI:10.3788/col201816.101201

所属栏目:Instrumentation, measurement and metrology

基金项目:This work was supported by the National Natural Science Foundation of China (Nos. 11602280 and 61705246).

收稿日期:2018-05-23

录用日期:2018-08-16

网络出版日期:2018-09-19

作者单位    点击查看

Longbo Xu:Nanjing University of Science and Technology, Nanjing 210094, China
Shijie Liu:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Rihong Zhu:Nanjing University of Science and Technology, Nanjing 210094, China
You Zhou:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Jie Chen:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

联系人作者:Rihong Zhu(zhurihong@njust.edu.cn)

【1】Z. Zhou, H. Shang, Y. Sui, Y. Sui, and H. Yang, Chin. Opt. Lett. 16 , 032201 (2018).

【2】L. Kong, L. Zhang, L. Zhu, H. Bao, Y. Guo, X. Rao, L. Zhong, and C. Rao, Chin. Opt. Lett. 14 , 100102 (2016).

【3】M. Yang, T. Li, C. Wang, J. Yang, W. Yang, T. Yi, S. Liu, S. Jiang, and Y. Ding, Chin. Opt. Lett. 14 , 101402 (2016).

【4】G. Schulz, and J. Schwider, Appl. Opt. 6 , 1077 (1967).

【5】G. Schulz, J. Schwider, C. Hiller, and B. Kicker, Appl. Opt. 10 , 929 (1971).

【6】B. S. Fritz, Opt. Eng. 23 , 379 (1984).

【7】C. Ai, and J. C. Wyant, Proc. SPIE 1776 , 73 (1992).

【8】C. Ai, and J. C. Wyant, Appl. Opt. 32 , 4698 (1993).

【9】M. F. Küchel, Optik 112 , 381 (2001).

【10】U. Griesmann, Q. Wang, and J. Soons, Opt. Eng. 46 , 093601 (2007).

【11】M. Vannoni, and G. Molesini, Opt. Express 15 , 6809 (2007).

【12】M. Vannoni, and G. Molesini, Opt. Express 16 , 340 (2008).

【13】M. Vannoni, A. Sordini, and G. Molesini, Opt. Express 51 , 081501 (2012).

【14】M. Vannoni, Opt. Express 22 , 3538 (2014).

【15】W. Lin, Y. He, L. Song, H. Luo, and J. Wang, Appl. Opt. 53 , 3370 (2014).

【16】Z. Han, L. Chen, T. Wulan, and R. Zhu, Optik 124 , 3781 (2013).

【17】L. Xu, Y. Zhou, R. Zhu, S. Liu, and W. Zheng, Opt. Precis. Eng. 24 , 3027 (2016).

【18】S. Liu, C. Jin, and Y. Zhou, Proc. SPIE 9525 , 952536 (2015).

引用该论文

Longbo Xu, Shijie Liu, Rihong Zhu, You Zhou, Jie Chen, "Absolute surface form measurement of flat optics based on oblique incidence method," Chinese Optics Letters 16(10), 101201 (2018)

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF