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Thermal process of silica glass microchannels fabricated by femtosecond laser ablation

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Abstract

In order to improve the morphology of microchannels fabricated by femtosecond laser ablation, the thermal process was introduced into the post-treatment processing. It was found that the thermal process cannot only decrease the roughness but also the width and depth of the microchannel. The change rates of width, depth, and roughness of the microchannel increase with processing temperature. When we prolong the time of constant temperature, the change rate of the width decreases at the beginning, and then it tends to be stable. However, the change rates of depth and roughness increase, and then they tend to be stable. In this Letter, we discuss the reasons of the above phenomena.

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DOI:10.3788/col201816.101402

所属栏目:Lasers and laser optics

基金项目:This work was supported by the National Natural Science Foundation of China (Nos. 51875584, 51475482, 51475481, and 51875585) and the National Key R&D Program of China (Nos. 2018YFB1107803 and 2017YFB1104800).

收稿日期:2018-06-05

录用日期:2018-08-30

网络出版日期:2018-09-21

作者单位    点击查看

Xiaoyan Sun:State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Dongmei Cui:State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Youwang Hu:State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Dongkai Chu:State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Guowei Chen:State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Jinlong Yu:State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Jianhang Zhou:State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
Ji’an Duan:State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China

联系人作者:Youwang Hu(huyw@csu.edu.cn)

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引用该论文

Xiaoyan Sun, Dongmei Cui, Youwang Hu, Dongkai Chu, Guowei Chen, Jinlong Yu, Jianhang Zhou, Ji’an Duan, "Thermal process of silica glass microchannels fabricated by femtosecond laser ablation," Chinese Optics Letters 16(10), 101402 (2018)

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