通过将水溶性石墨烯掺入至光引发剂2-苄基-2-二甲基氨基-1-(4-吗啉苯基)丁酮和季戊四醇三丙烯酸酯混合而成的光刻胶中, 利用飞秒激光双光子聚合技术制作一系列平面图案及三维立体结构。利用亲水角测试表征混合物的浸润性, 激光透过深度测试表征混合物的穿透性。实验结果证明, 掺杂有水溶性石墨烯的混合液与玻璃仍具有较强结合力和一定激光穿透性。最后利用拉曼成像与扫描电子显微镜表征平面图案及三维结构。证实使用去离子水作为分散液可以将水溶性石墨烯掺杂进微结构中, 并且掺杂有水溶性石墨烯的微结构在机械性能上比纯光刻胶微结构, 结构更稳定且形貌更统一。

Graphene is doped into the photoresist which is made by mixing the 2-benzyl-2-(dimethylamino)-4′-morpholino-butyroph and pentaerythritol triacrylate. A series of 2D image and 3D microstructure were fabricated based on the technology of femtosecond laser two-photon polymerization(TPP). The infiltration of the mixture was characterized by the hydrophilic angle test, and the penetration of the mixture was characterized by laser penetration depth test. The experimental results show that the mixture with graphene still has strong binding force with glass and laser penetration. At last, 2D image and 3D microstructure were characterized by Raman mapping and scanning electron microscope (SEM). It is confirmed that graphene can be relatively evenly mixed in microstructure by using deionized water as dispersion liquid, and the composite microstructure is more stable and the appearance is more uniform than the pure photoresist microstructure.