提出一种面向数字全息的相位畸变自动补偿方法,利用图像分割技术对被检测物体进行自动分割,生成相位掩模板,进而得到不含被测物体区域的畸变相位。基于相位畸变校正模型对畸变相位进行最小二乘拟合,最终实现相位畸变的自动补偿。实验中搭建了数字全息检测平台,并对晶圆表面进行测量,结果表明所提出的方法能够实现畸变相位的自动校正。

A method for the automatic phase-distortion compensation in digital holography is proposed, in which the image segmentation technique is used to automatically segment the detected objects, thus a phase mask is generated, and the phase-distortion in areas without containing the detected object region is further obtained. The least-squares fitting of phase-distortion based on the phase-distortion correction model is done and the automatic phase-distortion compensation is eventually achieved. In experiments, a built-in digital holographic inspection platform is established and the wafer surface measurement is conducted. The results show that the proposed method can be used to automatically correct phase-distortion.