微束能量色散X射线衍射(EDXRD)分析在测量小样品或样品微区的物相结构方面具有重要的应用前景。提出了一种采用自行研发的微束X射线荧光谱仪进行微束能量色散X射线衍射分析的研究方法。用便携式毛细管X光透镜聚焦的微束X射线荧光谱仪(焦斑直径为190.7 μm)对人民币5角硬币“角”部分长×宽为4 mm×4 mm的微区进行微束能量色散的X射线衍射扫描测量,并进行数据处理,得到该区域内Cu₃Sn(0 8 3)和CuO(2 0 2)等晶相的分布;同时,用台式毛细管X光透镜聚焦的微束X射线荧光谱仪(焦斑直径为31 μm)对一颗直径约为1 mm的矿石颗粒进行微束能量色散的X射线衍射二维扫描分析,得到扫描区域内SiO₂(3 2 9)和Fe₂O₃(1 1 6)等晶相的分布。结果表明,毛细管X光透镜聚焦的微束X射线荧光谱仪在开展小样品或样品微区的能量色散X射线衍射分析方面具有一定的应用前景。

Micro energy dispersive X-ray diffraction (EDXRD) analysis has importance application prospects in measuring the phase structure of small samples or sample micro-area. A novel method of micro EDXRD analysis using a self-development micro X-ray fluorescence spectrometer is proposed. The two-dimensional scan of a 4 mm×4 mm mico-area on the surface of a RMB-5-Jiao coin is made by a portable micro-beam X-ray fluorescence spectrometer based on polycapillary X-ray optics focusing (focal spot diameter is 190.7 μm). After the obtained data are processed, the mappings of Cu3Sn(0 8 3), CuO(2 0 2) and other crystal phases are presented. Simultaneously, the two-dimensional scan of an ore particle with diameter of about 1 mm is also made by a desktop micro-beam X-ray fluorescence spectrometer based on polycapillary X-ray optics focusing (focal spot diameter is 31 μm). The mappings of SiO2(3 2 9), Fe2O3(1 1 6) and other crystal phases are also presented. The results show that the micro-beam X-ray fluorescence spectrometer based on polycapillary X-ray optics focusing has a potential application in the micro energy dispersion X-ray diffraction analysis of small samples or micro-areas of samples.