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水射流辅助激光加工碳化硅的影响研究

Influence of Water Jet Assisted Laser Processing Silicon Carbide

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摘要

为了研究具有一定速度和角度的水射流在水射流辅助激光加工碳化硅材料中对加工槽体深度、宽度、热影响区的影响, 利用Fluent软件, 分别以不同速度和不同入射角度的水射流对材料表面冲击力大小的影响进行模拟, 从理论上分析冲击力对加工结果的影响, 同时进行相关实验验证。结果表明, 水射流速度相同时, 随着射流入射角度增加, 其对槽体表面的冲击力逐渐增大。与无水激光加工相比, 水射流辅助激光加工对所得槽体的深度影响较大, 对宽度影响很小或基本无影响, 热影响区显著降低, 槽体底部和槽口处存在较少熔渣和重凝层, 加工质量较好。

Abstract

In order to investigate the effects of a water jet with a certain speed and angle on the depth, width and heat affected zone of the processed groove in the water jet-assisted laser machining of silicon carbide. The Fluent software is used to simulate the effect of water jets at different speeds and different angles of incidence on the surface impact of the material. The impact of impact force on processing results is theoretically analyzed. At the same time, the relevant experiments are carried out for verification. The results show that when the water jet velocity is the same, the impact force on the surface of the groove gradually increases as the incident angle of the jet increases. Compared with the waterless laser processing, the water jet assisted laser processing has a great influence on the depth of the obtained groove, the effect of the width is small, and the heat affected zone is significantly reduced. There are less slag and re-condensation layer at the bottom and notch of the groove, thus the processing quality is better.

Newport宣传-MKS新实验室计划
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中图分类号:TN249

DOI:10.3788/lop56.011405

所属栏目:激光器与激光光学

基金项目:安徽省高校自然科学重点项目(KJ2015A013)、安徽省高校优秀青年人才支持计划重点项目(gxyqZD2016153)

收稿日期:2018-06-27

修改稿日期:2018-07-09

网络出版日期:2018-07-24

作者单位    点击查看

陈雪辉:安徽建筑大学机电学院, 安徽 合肥 230601
李翔:安徽建筑大学机电学院, 安徽 合肥 230601
吴超:安徽建筑大学机电学院, 安徽 合肥 230601
张遥:安徽建筑大学机电学院, 安徽 合肥 230601

联系人作者:陈雪辉(xhenxh@163.com)

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引用该论文

Chen Xuehui,Li Xiang,Wu Chao,Zhang Yao. Influence of Water Jet Assisted Laser Processing Silicon Carbide[J]. Laser & Optoelectronics Progress, 2019, 56(1): 011405

陈雪辉,李翔,吴超,张遥. 水射流辅助激光加工碳化硅的影响研究[J]. 激光与光电子学进展, 2019, 56(1): 011405

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