光学学报, 2019, 39 (1): 0126019, 网络出版: 2019-05-10
飞秒激光烧蚀氟化钙晶体表面特性 下载: 1172次
Surface Characteristics of CaF2 Crystal Ablated by Femtosecond Laser
物理光学 飞秒激光烧蚀 微结构 累积效应 氟化钙晶体 physical optics femtosecond laser ablation microstructure incubation effect CaF2 crystal
摘要
采用飞秒激光对氟化钙晶体表面进行加工。通过调控激光参数,采用静止聚焦和动态扫描两种方式在晶体表面加工出一系列微结构(烧蚀孔和烧蚀线)。分别对两种加工方式烧蚀后的氟化钙晶体表面微结构进行系统研究,包括参数依赖关系、材料表面烧蚀阈值等。计算结果表明:在静止聚焦情况下,累积因子为0.0033;在动态扫描情况下,当扫描方向与激光偏振方向垂直或平行时,累积因子分别为0.0043和0.0052。飞秒激光加工过程中的脉冲累积效应能够对晶体的烧蚀产生重要影响。
Abstract
Femtosecond laser is used to ablate a CaF2 crystal surface. By varying the laser parameters, we produce the microstructures (including ablation holes and lines) using stationary focusing ablation and dynamic scanning. The laser-induced microstructures on CaF2 crystal surface under both processing modes are investigated to obtain the parameter dependence and ablation threshold. The calculation results reveal that the incubation factor is 0.0033 in the stationary focusing case; whereas, in the case of dynamic scanning, the incubation factor is 0.0043 or 0.0052 when the scanning direction is perpendicular or parallel to the laser polarization, respectively. The results reveal that the incubation effect plays an important role in the process of femtosecond laser ablation on crystal surface.
郭太勇, 张立木, 任莹莹, 蔡阳健, CarolinaRomero, JavierR.VazquezdeAldana. 飞秒激光烧蚀氟化钙晶体表面特性[J]. 光学学报, 2019, 39(1): 0126019. Taiyong Guo, Limu Zhang, Yingying Ren, Yangjian Cai, Romero Carolina, R. Vazquez de Aldana Javier. Surface Characteristics of CaF2 Crystal Ablated by Femtosecond Laser[J]. Acta Optica Sinica, 2019, 39(1): 0126019.