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飞秒激光烧蚀氟化钙晶体表面特性

Surface Characteristics of CaF2 Crystal Ablated by Femtosecond Laser

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摘要

采用飞秒激光对氟化钙晶体表面进行加工。通过调控激光参数, 采用静止聚焦和动态扫描两种方式在晶体表面加工出一系列微结构(烧蚀孔和烧蚀线)。分别对两种加工方式烧蚀后的氟化钙晶体表面微结构进行系统研究, 包括参数依赖关系、材料表面烧蚀阈值等。计算结果表明:在静止聚焦情况下, 累积因子为0.0033; 在动态扫描情况下, 当扫描方向与激光偏振方向垂直或平行时, 累积因子分别为0.0043和0.0052。飞秒激光加工过程中的脉冲累积效应能够对晶体的烧蚀产生重要影响。

Abstract

Femtosecond laser is used to ablate a CaF2 crystal surface. By varying the laser parameters, we produce the microstructures (including ablation holes and lines) using stationary focusing ablation and dynamic scanning. The laser-induced microstructures on CaF2 crystal surface under both processing modes are investigated to obtain the parameter dependence and ablation threshold. The calculation results reveal that the incubation factor is 0.0033 in the stationary focusing case; whereas, in the case of dynamic scanning, the incubation factor is 0.0043 or 0.0052 when the scanning direction is perpendicular or parallel to the laser polarization, respectively. The results reveal that the incubation effect plays an important role in the process of femtosecond laser ablation on crystal surface.

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中图分类号:O437

DOI:10.3788/aos201939.0126019

所属栏目:“光场调控、传输及其应用”专题Ⅱ

基金项目:国家自然科学基金(11404194, 11874243)

收稿日期:2018-08-30

修改稿日期:2018-10-07

网络出版日期:2018-10-18

作者单位    点击查看

郭太勇:山东师范大学物理与电子科学学院光场调控及应用中心, 山东省光学与光子器件技术重点实验室, 山东 济南 250014
张立木:山东师范大学物理与电子科学学院光场调控及应用中心, 山东省光学与光子器件技术重点实验室, 山东 济南 250014
任莹莹:山东师范大学物理与电子科学学院光场调控及应用中心, 山东省光学与光子器件技术重点实验室, 山东 济南 250014
蔡阳健:山东师范大学物理与电子科学学院光场调控及应用中心, 山东省光学与光子器件技术重点实验室, 山东 济南 250014
Carolina Romero:萨拉曼卡大学应用物理系激光微加工组, 西班牙 萨拉曼卡 37008
Javier R. Vázquez de Aldana:萨拉曼卡大学应用物理系激光微加工组, 西班牙 萨拉曼卡 37008

联系人作者:任莹莹(ryywly@sdnu.edu.cn); 蔡阳健(yangjiancai@sdnu.edu.cn);

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引用该论文

Guo Taiyong,Zhang Limu,Ren Yingying,Cai Yangjian,Carolina Romero,Javier R. Vázquez de Aldana. Surface Characteristics of CaF2 Crystal Ablated by Femtosecond Laser[J]. Acta Optica Sinica, 2019, 39(1): 0126019

郭太勇,张立木,任莹莹,蔡阳健,Carolina Romero,Javier R. Vázquez de Aldana. 飞秒激光烧蚀氟化钙晶体表面特性[J]. 光学学报, 2019, 39(1): 0126019

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