光学学报, 2019, 39 (1): 0126012, 网络出版: 2019-05-10
基于整形飞秒激光脉冲的三维微纳制备 
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Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses
物理光学 光学器件 飞秒激光 脉冲整形 微加工 physical optics optical devices femtosecond laser pulse shaping micromachining
摘要
飞秒激光脉冲加工具有热效应小、加工精度突破衍射极限、三维内部加工能力等特性,在微纳制备领域独具优势。综述了利用飞秒激光脉冲整形技术结合飞秒激光三维直写进行透明介质中微纳制备的最新进展,这些技术有望在新型集成光学和微纳光学中发挥重要的作用。
Abstract
Femtosecond laser micromachining has been widely used in laser material processing because of its unique advantages of low thermal effects, high precision and three-dimensional processing capability inside materials. The recent advances of the application of femtosecond laser microfabrication combined with femtosecond laser pulse shaping to micro-nanofabrication in transparent materials are reviewed. These techniques possess an important application prospect in novel integrated optics and micro- and nano-optics.
乔玲玲, 储蔚, 王哲, 程亚. 基于整形飞秒激光脉冲的三维微纳制备[J]. 光学学报, 2019, 39(1): 0126012. Lingling Qiao, Wei Chu, Zhe Wang, Ya Cheng. Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses[J]. Acta Optica Sinica, 2019, 39(1): 0126012.
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