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Imaging method of single layer graphene on metal substrate based on imaging ellipsometer with large field of view

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Abstract

Single layer lattice graphene deposited on the metal substrate can hardly be imaged by the optical microscope. In this Letter, a large field-of-view imaging ellipsometer is introduced to image single layer graphene which is deposited on a metal substrate. By adjusting the polarizer and the analyzer of imaging ellipsometer, the light reflected from surfaces of either single layer graphene or a Au film substrate can be extinguished, respectively. Thus, single layer graphene can be imaged correspondingly under brightfield or darkfield imaging modes. The method can be applied to imaging large-area graphene on a metal substrate.

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DOI:10.3788/col201917.011201

所属栏目:Instrumentation, measurement and metrology

基金项目:This work is supported by the Intergovernmental International Cooperation Program in Science and Technology Innovation (No. 2016YFE0110600), the International Science & Technology Cooperation Program of Shanghai (No. 16520710500), the National Natural Science Foundation of China (No. 51605473), the Youth Innovation Promotion Association of CAS, the Science and Technology Commission of Shanghai Municipality (No. 17YF1429500), and the Shanghai Sailing Program (No. 18YF1426500).

收稿日期:2018-08-08

录用日期:2018-11-12

网络出版日期:2018-12-20

作者单位    点击查看

Guiyun Li:Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, China
Liyuan Gu:Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, China
Jingpei Hu:Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Linglin Zhu:Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Aijun Zeng:Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, China
Huijie Huang:Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, China

联系人作者:Aijun Zeng(aijunzeng@siom.ac.cn)

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引用该论文

Guiyun Li, Liyuan Gu, Jingpei Hu, Linglin Zhu, Aijun Zeng, Huijie Huang, "Imaging method of single layer graphene on metal substrate based on imaging ellipsometer with large field of view," Chinese Optics Letters 17(1), 011201 (2019)

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