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Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis

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Abstract

We report a method for simultaneously and directly measuring all six-degrees-of-freedom (six-DOF) motion errors of a rotary axis. Such a method combines the principles of laser interferometry and laser collimation measurement. One reference rotary axis and two retro-reflectors are used to achieve simultaneous sensitivity to all six errors in a full-circle measuring range. As no separation models are required, our method is capable of dynamically measuring these errors in real time and conveniently determining the origin of the errors. An automatic measuring device is built. The effectiveness of our method is experimentally demonstrated.

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DOI:10.3788/col201917.011203

所属栏目:Instrumentation, measurement and metrology

基金项目:This work was supported by the National Natural Science Foundation of China (No. 51527806) and the Fundamental Research Funds for the Central Universities (No. 2016RC019).

收稿日期:2018-09-14

录用日期:2018-11-23

网络出版日期:2018-12-27

作者单位    点击查看

Jiakun Li:Key Laboratory of Luminescence and Optical Information, Ministry of Education, Beijing Jiaotong University, Beijing 100044, China
Qibo Feng:Key Laboratory of Luminescence and Optical Information, Ministry of Education, Beijing Jiaotong University, Beijing 100044, China
Chuanchen Bao:Key Laboratory of Luminescence and Optical Information, Ministry of Education, Beijing Jiaotong University, Beijing 100044, China
Bin Zhang:Key Laboratory of Luminescence and Optical Information, Ministry of Education, Beijing Jiaotong University, Beijing 100044, China

联系人作者:Qibo Feng(qbfeng@bjtu.edu.cn)

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引用该论文

Jiakun Li, Qibo Feng, Chuanchen Bao, Bin Zhang, "Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis," Chinese Optics Letters 17(1), 011203 (2019)

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