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基于计算全息元件的大口径非球面透镜透射波前检测方法

Measurement of the Transmission Wavefront of a Large-Aperture Aspheric Lens Based on Computer-Generated Hologram

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摘要

针对大口径非球面透镜透射波前检测, 提出了采用计算全息元件(CGH)作为光路相位补偿元件进行检测的方法。大口径非球面透镜透射波前通常采用球面干涉仪进行检测, 为了达到零位检测的目的, 在光路中往往需要加入相位补偿元件以补偿高阶像差(HOA)。传统的折射式相位补偿元件的精度溯源比较困难, 导致检测数据缺乏可信度。将CGH作为相位补偿元件可达到零位检测的目的。针对大口径非球面透镜的透射波前检测, 设计并加工了相应的CGH作为相位补偿元件, 并与传统的折射式补偿元件进行了对比测试。测试结果表明:两种相位补偿方法的测试数据具有良好的一致性, 峰谷(PV)值的差值为0.034λ(λ为检测光的波长), 均方根(RMS)值的差值为0.006λ, 因此CGH作为相位补偿元件具有相当高的测试精度。

Abstract

To measure the transmission wavefront of a large-aperture aspheric lens, we propose a method by using a computer-generated hologram (CGH) as a phase compensation element. The transmission wavefront of a large-aperture aspheric lens is typically tested by a sphere interferometer. To conduct a null test, phase compensation is required to compensate for high-order aberrations (HOAs). However, validating the accuracy of conventional refractive-phase compensation elements is difficult, and they therefore generate unreliable measurement results. An alternative type of phase compensation employs a CGH, which is a diffraction element that can also be used to conduct a null test. To conduct a null test for the transmission wavefront of a large-aperture aspheric lens, we design and manufacture a CGH. A contrast test is implemented with two different phase compensation elements, which results in two measured data those are very similar to one another, between which the peak valley (PV) difference is 0.034λ (λ is the wavelength of the detect light), and the root mean square (RMS) difference is 0.006λ. Therefore, the null-test method using a CGH proposed in this study displays a high degree of accuracy.

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中图分类号:O436

DOI:10.3788/lop56.021202

所属栏目:仪器,测量与计量

收稿日期:2018-05-29

修改稿日期:2018-06-30

网络出版日期:2018-07-26

作者单位    点击查看

何宇航:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
李强:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
高波:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
魏小红:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
柴立群:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900

联系人作者:何宇航(hang_yu_he@163.com)

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引用该论文

He Yuhang,Li Qiang,Gao Bo,Wei Xiaohong,Chai Liqun. Measurement of the Transmission Wavefront of a Large-Aperture Aspheric Lens Based on Computer-Generated Hologram[J]. Laser & Optoelectronics Progress, 2019, 56(2): 021202

何宇航,李强,高波,魏小红,柴立群. 基于计算全息元件的大口径非球面透镜透射波前检测方法[J]. 激光与光电子学进展, 2019, 56(2): 021202

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