光学学报, 2019, 39 (3): 0312004, 网络出版: 2019-05-10   

光刻投影物镜的琼斯光瞳检测方法 下载: 1242次

Jones Pupil Measurement Method of Lithographic Projection Lens
孟泽江 1,2李思坤 1,2,*王向朝 1,2,*步扬 1,2杨朝兴 1,2
作者单位
1 中国科学院上海光学精密机械研究所信息光学与光电技术实验室, 上海 201800
2 中国科学院大学, 北京 100049
摘要
提出一种基于琼斯光瞳的光刻投影物镜偏振像差检测方法。推导了基于琼斯矩阵的检测方程,建立了光强矢量与琼斯矩阵克氏积的线性关系,利用该线性关系直接检测琼斯光瞳形式的偏振像差。以一个典型的光刻投影物镜的琼斯光瞳为检测对象对所提方法进行仿真验证,仿真中考虑了偏振元件与CCD的实际参数误差,并与传统穆勒矩阵椭偏法转换得到的琼斯光瞳进行比较。对于同一种典型的偏振元件旋转角组合,与传统测量方法相比,所提方法测量的偏振衰减和偏振相位延迟误差均明显降低。仿真结果表明,所提方法在不增加现有测量装置复杂度的基础上,明显提高了琼斯光瞳形式偏振像差的测量精度。
Abstract
A Jones-pupil-based method for measuring the polarization aberrations of the lithographic projection lens is proposed. A measurement equation based on the Jones matrix is derived, and a linear relationship between the intensity vector and the Kronecker product of the Jones matrix is built. The polarization aberration in the form of Jones pupil can be directly measured by this linear relationship. Using a Jones pupil of the typical lithographic projection lens as a measurement object, the numerical simulation are conducted to validate the proposed method. In these simulations, the actual parameter errors between the polarization elements and the charge coupled device (CCD) are considered. Measurement errors of this method are also compared with the results converted from the conventional Mueller pupil metrology. For the same rotation-angle configuration of polarization elements, the measurement errors of the diattenuation and the retardance by the proposed method are reduced significantly compared with that by the conventional method. The simulation results show that the proposed method can greatly improve the measurement accuracy of the polarization aberrations in the form of Jones pupil, without increasing the complexity of the existing metrology system.

孟泽江, 李思坤, 王向朝, 步扬, 杨朝兴. 光刻投影物镜的琼斯光瞳检测方法[J]. 光学学报, 2019, 39(3): 0312004. Zejiang Meng, Sikun Li, Xiangzhao Wang, Yang Bu, Chaoxing Yang. Jones Pupil Measurement Method of Lithographic Projection Lens[J]. Acta Optica Sinica, 2019, 39(3): 0312004.

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