提出了一种软X射线荧光吸收谱测试方法。该方法克服了软X射线荧光产率低的问题,消除了荧光自吸收效应,采用部分荧光产额模式获得了材料的软X射线近边吸收结构。使用部分荧光产额模式对钙钛矿太阳能电池的埋藏元素、催化剂的低浓度元素,以及宽禁带半导体进行软X射线近边吸收谱研究。相比全电子产额模式,基于荧光产额模式的软X射线近边吸收结构在材料体相特性、不良导体和低浓度样品测试中更具优势。

A testing method of fluorescence based soft X-ray absorption spectroscopy is proposed. The method overcomes the problem of low fluorescence yield in soft X-ray region and eliminates self-absorption effect of fluorescence, and the soft X-ray absorption near edge structures (S-XANES) of materials are obtained by partially fluorescence yield (PFY) mode. Through the PFY mode, the soft X-ray absorption near edge structures of the buried element in perovskite solar cells, the trace element of catalyst, and the wide bandgap semiconductor are investigated. Compared with the total electron yield mode (TEY), the developed PFY mode of S-XANES has the advantages in characterization of materials bulk property, insulating materials and samples with low concentration.