基于严格耦合波分析,研究凸面闪耀光栅的衍射特性;采用全息光刻-离子束刻蚀法制作中心周期为2.45 μm、曲率半径为51.64 mm、口径为17 mm的凸面闪耀光栅,闪耀角为6.4°,顶角为141°。结果表明,在整个可见-近红外波段,所制作光栅的1级衍射效率大于40%,在闪耀波长处1级衍射效率大于75%。

The diffraction characteristics of the convex blazed grating are investigated by using rigorous coupled-wave analysis. The convex blazed grating with a central period of 2.45 μm, a curvature radius of 51.64 mm, and an aperture of 17 mm is fabricated by using holographic lithography-scanning ion beam etching method. The blazed angle is 6.4°, and the vertex angle is 141°. The results show that the first-order diffraction efficiency of the proposed grating is greater than 40% in the whole visible and near-infrared band, and the first-order diffraction efficiency at blaze wavelength is greater than 75%.