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垂直腔面发射激光器氧化孔结构对器件激射性能的影响

Influence of Oxide Aperture Structure on Lasing Performance for Vertical Cavity Surface Emitting Laser

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摘要

为实现894.6 nm低阈值、高稳定性、单模激光输出, 设计了具有不同台面刻蚀结构的垂直腔面发射激光器(VCSEL)器件, 研究了台面直径和氧化孔结构对器件激射性能的影响。研究结果表明: VCSEL台面直径越大, 阈值电流越大; 氧化孔径越偏向圆形, 边模抑制比越高。制备了氧化孔为圆形、直径为4.4 μm的VCSEL器件, 该器件在70~90 ℃工作温度及0.6 mA驱动电流下实现了894.6 nm单模激光输出, 边模抑制比高于35 dB。

Abstract

In order to realize 894.6 nm single mode laser output with low threshold, high stability, we design vertical cavity surface emitting laser (VCSEL) devices with different mesa etching structure and study the influences of mesa diameter, oxide aperture shape and size on lasing performance. The research results show that the larger of the mesa in VCSEL device, the higher the threshold current; the more circular the oxide aperture, the higher the single mode suppression ratio. VCSEL devices with diameter of 4.4 μm circular oxide aperture is achieved, and the device can realize 894.6 nm single mode laser output with driving current of 0.6 mA and working temperature of 70-90 ℃, and the side mode suppression ratio is higher than 35 dB.

Newport宣传-MKS新实验室计划
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中图分类号:TN248.4

DOI:10.3788/cjl201946.0301001

所属栏目:激光器件与激光物理

基金项目:国家重点研发计划项目(2017YFB0402800)、国家自然科学基金(61504010, 61504022)、吉林省科技厅中青年科技创新领军人才及团队项目(20160519007JH)、吉林省科技厅重大科技招标专项(20160203015GX)

收稿日期:2018-10-30

修改稿日期:2018-11-26

网络出版日期:2018-12-12

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梁静:长春理工大学理学院高功率半导体激光器国家重点实验室, 吉林 长春 130022中国科学院苏州纳米技术与纳米仿生研究所, 江苏 苏州 215123
贾慧民:长春理工大学理学院高功率半导体激光器国家重点实验室, 吉林 长春 130022
冯海通:中国科学院苏州纳米技术与纳米仿生研究所, 江苏 苏州 215123
唐吉龙:长春理工大学理学院高功率半导体激光器国家重点实验室, 吉林 长春 130022
房丹:长春理工大学理学院高功率半导体激光器国家重点实验室, 吉林 长春 130022
苏瑞巩:中国科学院苏州纳米技术与纳米仿生研究所, 江苏 苏州 215123
张宝顺:中国科学院苏州纳米技术与纳米仿生研究所, 江苏 苏州 215123
魏志鹏:长春理工大学理学院高功率半导体激光器国家重点实验室, 吉林 长春 130022

联系人作者:贾慧民(huiminjia01@163.com)

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引用该论文

Liang Jing,Jia Huimin,Feng Haitong,Tang Jilong,Fang Dan,Su Ruigong,Zhang Baoshun,Wei Zhipeng. Influence of Oxide Aperture Structure on Lasing Performance for Vertical Cavity Surface Emitting Laser[J]. Chinese Journal of Lasers, 2019, 46(3): 0301001

梁静,贾慧民,冯海通,唐吉龙,房丹,苏瑞巩,张宝顺,魏志鹏. 垂直腔面发射激光器氧化孔结构对器件激射性能的影响[J]. 中国激光, 2019, 46(3): 0301001

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