提出了一种基于自准直仪的在位校准方法。基于圆周封闭原则和傅里叶级数的性质,建立了测量值与理想值之间的函数关系,利用理想刻线位置和实际刻线位置的偏差,获得了校准曲线,详细推导和分析了校准原理,搭建了校准测角系统,并进行了实验验证。实验结果表明,单读数头测角传感器原始测角误差为734.8″,校准后误差为2.4″,且校准效果优于常用的谐波补偿方法,校准系统的重复性优于0.13″。在位校准方法能够有效减小测角误差,且方法简单,校准效率高。

An in-situ calibration method based on the autocollimator is proposed. Based on the principle of circumferential closure and the nature of Fourier series, this paper establishes the functional relationship between the measured value and the ideal value. Using the deviation between the ideal scribing position and the actual scribing position, we obtain the calibration curves. The calibration principle is deduced and analyzed in detail. The calibration angle measurement system is built and verified by experiments. The experimental results show that the original angle measurement error of the single readhead angle measurement sensor is 734.8″, and the error after calibration is 2.4″, and the calibration effect is better than that of the commonly used harmonic compensation method. The repeatability of the calibration system is better than 0.13″. The in-situ calibration method can effectively reduce the angle measurement error, and the method is simple and the calibration efficiency is high.