激光回馈技术灵敏度高, 并且无须配合靶镜就能够测量诸如黑色、粗糙的目标的位移或形变。为了消除环境(气压、地基震动、温度漂移等)对测量精度的影响, 设计、构建了稳定的微片正交偏振激光器, 采用半导体激光器泵浦微片; 搭建了包括光学、电路的完整的正交回馈干涉仪系统, 系统工作稳定, 实现了远距离处测量。这一系统能有效地减小环境对测量的影响, 提高激光回馈干涉仪的精度。

The laser feedback technique had the advantage of high sensitivity, which could fulfill the displacement and deformation measurement of targets with black and rough surfaces without the need of cooperative target mirrors. In this paper, in order to eliminate the influences of environment (including air pressure, base vibration, drift in temperature, etc.) on measurement accuracy, steady orthogonally polarized microchip laser was designed and assembled. The orthogonally polarized laser feedback system was built with optical components and electric circuits. The system had capability to achieve long-distance measurement and work in steady state. The system could effectively reduce the influences of environment and improve the accuracy of the laser feedback interferometer.