Photonics Research, 2019, 7 (4): 04000437, Published Online: Apr. 11, 2019  

25 Gbps low-voltage hetero-structured silicon-germanium waveguide pin photodetectors for monolithic on-chip nanophotonic architectures

Author Affiliations
1 Centre de Nanosciences et de Nanotechnologies, CNRS, University of Paris-Sud, Université Paris-Saclay, C2N–Palaiseau, 91120 Palaiseau, France
2 University Grenoble Alpes and CEA, LETI, Minatec Campus, F-38054 Grenoble, Grenoble Cedex, France
3 Technology R&D, STMicroelectronics SAS, 850 rue Jean Monnet–38920 Crolles, France
Abstract
Near-infrared germanium (Ge) photodetectors monolithically integrated on top of silicon-on-insulator substrates are universally regarded as key enablers towards chip-scale nanophotonics, with applications ranging from sensing and health monitoring to object recognition and optical communications. In this work, we report on the high-data-rate performance pin waveguide photodetectors made of a lateral hetero-structured silicon-Ge-silicon (Si-Ge-Si) junction operating under low reverse bias at 1.55 μm. The pin photodetector integration scheme considerably eases device manufacturing and is fully compatible with complementary metal-oxide-semiconductor technology. In particular, the hetero-structured Si-Ge-Si photodetectors show efficiency-bandwidth products of ~9 GHz at ?1 V and ~30 GHz at ?3 V, with a leakage dark current as low as ~150 nA, allowing superior signal detection of high-speed data traffic. A bit-error rate of 10?9 is achieved for conventional 10 Gbps, 20 Gbps, and 25 Gbps data rates, yielding optical power sensitivities of ?13.85 dBm, ?12.70 dBm, and ?11.25 dBm, respectively. This demonstration opens up new horizons towards cost-effective Ge pin waveguide photodetectors that combine fast device operation at low voltages with standard semiconductor fabrication processes, as desired for reliable on-chip architectures in next-generation nanophotonics integrated circuits.

Daniel Benedikovic, Léopold Virot, Guy Aubin, Farah Amar, Bertrand Szelag, Bayram Karakus, Jean-Michel Hartmann, Carlos Alonso-Ramos, Xavier Le Roux, Paul Crozat, Eric Cassan, Delphine Marris-Morini, Charles Baudot, Frédéric Boeuf, Jean-Marc Fédéli, Christophe Kopp, Laurent Vivien. 25 Gbps low-voltage hetero-structured silicon-germanium waveguide pin photodetectors for monolithic on-chip nanophotonic architectures[J]. Photonics Research, 2019, 7(4): 04000437.

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