光学学报, 2019, 39 (5): 0522001, 网络出版: 2019-05-10   

具有迟滞补偿的单压电变形镜的闭环校正性能 下载: 973次

Performance of Closed-Loop Correction with Hysteresis Compensation for Unimorph Deformable Mirror
作者单位
宁波大学机械工程与力学学院, 浙江 宁波 315211
摘要
对具有迟滞补偿的单压电变形镜的闭环校正性能进行了研究。提出了基于Prandtl-Ishlinskii(PI)迟滞模型的变形镜闭环控制算法,搭建了基于哈特曼波前传感器的自适应光学测试平台,分别进行了静态像差和动态像差的闭环校正实验。实验结果表明:在静态像差的闭环校正中,迟滞消除算法比未消除算法具有更快的校正速度;对于波前像差均方根的平均值为168 nm的动态像差,校正后的残差从消除前的33 nm降低到校正后的25 nm,证明了所提算法可有效应用于压电变形镜自适应光学系统。
Abstract
This study investigated the correction performance of closed-loop control with hysteresis compensation for a piezoelectric unimorph deformable mirror. A closed-loop control algorithm based on the Prandtl-Ishlinskii hysteresis model was established herein. In addition, an adaptive optics test platform based on the Hartmann wavefront sensor was built. The closed-loop correction experiments of static and dynamic aberrations were performed. The experimental results show that for the closed-loop correction of static aberrations, the correction speed of the algorithm with hysteresis compensation is faster than that without compensation. Further, for the dynamic aberrations with an average root-mean-square value of 168 nm, the residual error after correction is reduced from 33 nm before hysteresis compensation to 25 nm after hysteresis compensation. These results prove that the proposed method can be efficiently used in an adaptive optics system with a piezoelectric deformable mirror.

杨宗峰, 李文来, 彭泰然, 崔玉国, 马剑强. 具有迟滞补偿的单压电变形镜的闭环校正性能[J]. 光学学报, 2019, 39(5): 0522001. Zongfeng Yang, Wenlai Li, Tairan Peng, Yuguo Cui, Jianqiang Ma. Performance of Closed-Loop Correction with Hysteresis Compensation for Unimorph Deformable Mirror[J]. Acta Optica Sinica, 2019, 39(5): 0522001.

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