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大梯度相位单幅干涉图的解相方法

Phase Retrieval Methods for Single Interferogram with Large Gradient Phase

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摘要

针对加工中的大梯度相位在线检测需求,提出一种基于数字叠栅移相方法和牛顿迭代算法的单幅干涉图解相方法。在不同待测相位下,将所提方法的结果与其他3种典型的单幅干涉图解相方法进行仿真对比,结果表明,所提方法的解相精度较高。对离焦球面产生的大梯度相位进行测量实验,并将实验结果与ZYGO公司生产的干涉仪机械移相测量结果进行对比,验证了所提方法的有效性。

Abstract

To meet the requirement of on-line detection of large gradient phases in machining, a single interferogram phase retrieval method based on the digital moiré phase shift algorithm and the Newton iteration algorithm is proposed herein. In the simulation, we compared the proposed method with three typical phase retrieval methods for single interferogram under different phases to be measured. The results show that the proposed method has high accuracy. We then experimentally measured the large gradient phase produced by a defocused sphere, and compared our result with the measurement result of mechanical phase shift in the interferometer produced by ZYGO corporation. The effectiveness of the proposed method is verified.

Newport宣传-MKS新实验室计划
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中图分类号:O439

DOI:10.3788/cjl201946.0504002

所属栏目:测量与计量

基金项目:国家自然科学基金(51735002,61705008)

收稿日期:2018-11-27

修改稿日期:2019-01-26

网络出版日期:2019-02-18

作者单位    点击查看

叶明哲:北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室, 北京 100081
王劭溥:中国空间技术研究院北京卫星环境工程研究所, 北京 100094
胡摇:北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室, 北京 100081
郝群:北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室, 北京 100081

联系人作者:胡摇(huy08@bit.edu.cn)

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引用该论文

Ye Mingzhe,Wang Shaopu,Hu Yao,Hao Qun. Phase Retrieval Methods for Single Interferogram with Large Gradient Phase[J]. Chinese Journal of Lasers, 2019, 46(5): 0504002

叶明哲,王劭溥,胡摇,郝群. 大梯度相位单幅干涉图的解相方法[J]. 中国激光, 2019, 46(5): 0504002

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