光谱学与光谱分析, 2020, 40 (8): 2647, 网络出版: 2020-08-12  

提高红外微测辐射热计光谱吸收率的金属光栅结构研究

Study on Metal Grating Structure for Improving Spectral Absorptivity of Infrared Microbolometer
作者单位
1 渤海大学新能源学院, 辽宁 锦州 121013
2 哈尔滨工业大学仪器科学与工程学院, 黑龙江 哈尔滨 150001
摘要
为提高红外微测辐射热计的光谱吸收率, 设计一种基于表面等离激元的金属光栅促吸收结构, 研究光栅结构参数对光谱吸收率的影响规律。 以金作为光栅材料, 利用等离激元的谐振结构, 克服金属材料的高反射特性, 增强红外微测辐射热计的红外吸收能力。 通过改变光栅的结构参数, 对等离子共振波长进行调节, 提高红外微测辐射计工作波段内的光谱吸收效率。 利用有限差分法, 分析光栅参数对光谱吸收率的影响机理, 研究金属光栅的周期、 占空比和高度对光谱吸收率的调控规律。 随着光栅周期由2 μm逐渐增加到5 μm, 吸收峰的峰值波长发生明显的红移现象, 吸收峰高度呈现出较明显的下降趋势。 随着光栅占空比从0.2逐渐增加到0.5, 红外吸收峰的峰值波长向短波长移动, 吸收峰高度也逐渐增高, 但吸收峰宽度逐渐变窄。 光栅厚度对吸收峰的峰值影响不大, 当厚度达到一定程度后, 峰值基本保持不变。 峰值波长随厚度增加出现不同程度的减小, 当厚度不足100 nm时, 峰值波长减小的程度较大, 随着厚度的继续增加, 下降趋势逐渐变缓, 基本维持在10.6 μm附近。 通过分析光栅结构参数对光谱吸收率的影响机理, 对光栅结构参数的进一步优化, 大幅提高氧化钒红外微测辐射热计的红外光谱吸收率, 8~14 μm的平均吸收率达61.6%, 峰值吸收率在99%以上。 金属光栅的光谱吸收率促吸收结构研究, 对高性能红外微测辐射热计的设计具有重要的指导意义。
Abstract
In order to improve the spectral absorptivity of infrared microbolometer, a metal grating absorption promoting structure based on surface plasmon was designed, and the influence of grating structure parameters on the spectral absorptivity was studied. Using the gold as grating material and the resonance structure of plasmon, the high reflectivity of metal material is overcome to enhance the infrared absorption capacity of infrared microbolometer. By changing the structure parameters of the grating and adjusting the resonance wavelength of the plasma, the spectral absorption efficiency in the working band of the infrared microbolometer can be improved. The influence mechanism of grating parameters on spectral absorptivity was analyzed by finite difference method. The regulation of the period, duty cycle, position and height of metal grating on spectral absorptivity was studied. With the grating period increasing from 2 to 5 microns, the peak wavelength of the absorption peak has a significant red shift, and the height of the absorption peak has a significant change. Although the overall trend is downward, the absorption peak at 3 microns is slightly higher than that at 2 microns. As the duty cycle of grating increases from 0.2 to 0.5, the infrared absorption peak shifts to short wavelength, and the height of the absorption peak increase gradually, but the width also narrows slightly. With the increase of grating thickness, the peak value of absorption peak is not affected very much, especially when uhe thickness increases to a certain extent, the peak value remains basically unchanged. however, the peak wavelength decreases with the increase of thickness. With the increase of thickness, the peak wavelength decreases slowly, and basically maintains near 10.6 μm. Based on the analysis of the mechanism of the influence of grating structure parameters on spectral absorptivity, the infrared absorption of vanadium oxide infrared microbolometer is greatly improved by further optimization of grating structure parameters. The average absorption of 8~14 μm is 61.6%, and the peak absorption is over 99%. The research on the absorption-promoting structure of metal grating has important guiding significance for the design of high-performance infrared microbolometer.

张宇峰, 王洋, 吴元庆, 戴景民. 提高红外微测辐射热计光谱吸收率的金属光栅结构研究[J]. 光谱学与光谱分析, 2020, 40(8): 2647. ZHANG Yu-feng, WANG Yang, WU Yuan-qing, DAI Jing-min. Study on Metal Grating Structure for Improving Spectral Absorptivity of Infrared Microbolometer[J]. Spectroscopy and Spectral Analysis, 2020, 40(8): 2647.

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