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基于MATLAB与非球面轮廓仪的Q-Type非球面检测技术

Q-Type Asphere Testing Technology Based on MATLAB and Aspheric Profilometer

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摘要

Q-type非球面广泛应用于光学系统设计中,针对Q-type非球面超精密加工过程中的面形检测问题,提出了一种MATLAB软件与Taylor Horbson PGI-1240非球面轮廓仪相结合的方法,以达到对Q-type非球面进行高精度检测的目的。检测结果表明,由Nanoform 700 Ultra单点金刚石超精密车床加工的全口径为11.8 mm的单晶铜Q-type非球面面形误差峰谷(PV)值为0.1963 μm,表面粗糙度方均根(RMS)值为0.03412 μm,满足加工第一阶段面形误差PV值<0.2 μm和表面粗糙度RMS值<0.04 μm的要求。此检测方法可以精确得到工件面形误差,为下一阶段车削加工提供数据支持。

Abstract

Q-type asphere has broad application prospect which has been applied in optical system design increasingly. But there is no easy or high-efficiency way to test the Q-type aspherical surface precisely until now. Aimed at the testing of Q-type asphere in the process of ultra-precision turning, a method based on MATLAB and Taylor Horbson PGI-1240 aspheric profilometer is proposed. First, we have fabricated a single crystal cupreous Q-type asphere whose aperture is 11.8 mm by Nanoform 700 single point diamond ultra turning lathe. And the testing result shows that, the PV and RMS values of Q-type asphere surface shape error are 0.1963 μm and 0.03412 μm. It meets the requirement that PV value should be less than 0.2 μm as well as RMS value should be less than 0.04 μm. This testing method can get precise surface shape error and provide data support for next stage of turning.

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DOI:10.3788/LOP56.151201

所属栏目:仪器,测量与计量

基金项目:吉林省重点科技研发项目(20180201030GX);

收稿日期:2019-01-29

修改稿日期:2019-02-27

网络出版日期:2019-08-01

作者单位    点击查看

贾孟:长春理工大学光电工程学院, 吉林 长春 130022
薛常喜:长春理工大学光电工程学院, 吉林 长春 130022
李闯:长春理工大学光电工程学院, 吉林 长春 130022
兰喜瑞:长春理工大学光电工程学院, 吉林 长春 130022
王蕾:长春理工大学光电工程学院, 吉林 长春 130022
王伦:长春理工大学光电工程学院, 吉林 长春 130022
吴百融:长春理工大学光电工程学院, 吉林 长春 130022

联系人作者:薛常喜(xcx272479@sina.com)

备注:吉林省重点科技研发项目(20180201030GX);

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引用该论文

Jia Meng,Xue Changxi,Li Chuang,Lan Xirui,Wang Lei,Wang Lun,Wu Bairong. Q-Type Asphere Testing Technology Based on MATLAB and Aspheric Profilometer[J]. Laser & Optoelectronics Progress, 2019, 56(15): 151201

贾孟,薛常喜,李闯,兰喜瑞,王蕾,王伦,吴百融. 基于MATLAB与非球面轮廓仪的Q-Type非球面检测技术[J]. 激光与光电子学进展, 2019, 56(15): 151201

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