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一种前照式CMOS探测器像元内响应测量和解算方法

Measurement and Resolution Method for Intra-Pixel Response of Front-Illuminated CMOS Sensors

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摘要

针对前照式CMOS可见光探测器填充因子小于1而引起的点目标在像面成像时输出能量随位置波动的问题,搭建了像元内响应测试系统。根据像元内部设计结构建立了在亚像素尺度上表征响应分布的像元内响应模型。使用两个不同半径的小孔对可见光探测器中的4个像元进行了测试。移动小孔的位置,记录小孔成像在像面不同位置时像元输出的响应值,使用拟合方法对像元内响应函数及点目标能量的高斯函数的半峰全宽进行了解算。实验结果表明,通过求解探测器的像元内响应函数,可对像元内灵敏度的空间分布特征进行描述。该测试与解算方法可为同类型探测器响应的微观表征提供有益参考。

Abstract

This study builds an intra-pixel response measurement system to overcome the issue arising when the output energy of the point target fluctuates with position, which is caused by the fill factor of the forward-illuminated CMOS image sensor less than 1. According to the interior design structure of the pixel, an intra-pixel response model is established. Two holes with different radii are used to measure the intra-pixel response functions of four pixels in the sensor. The response value of the pixel is recorded when the hole is moved to different positions. The full widths at half maximum of Gauss function of the point target and the intra-pixel response function are calculated. Experimental results show that the spatial distribution characteristics of sensitivity within the pixel can be described by calculating the intra-pixel response function. The measurement and resolution method proposed herein is able to provide a useful reference for the microscopic representation of this type of sensor.

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DOI:10.3788/CJL201946.0910002

所属栏目:遥感与传感器

收稿日期:2019-03-25

修改稿日期:2019-05-13

网络出版日期:2019-09-01

作者单位    点击查看

胡琸悦:中国科学院上海技术物理研究所智能红外感知重点实验室, 上海 200083中国科学院大学, 北京 100049
周晓东:上海航天技术研究院, 上海 201109
唐玉俊:中国科学院上海技术物理研究所智能红外感知重点实验室, 上海 200083
陈凡胜:中国科学院上海技术物理研究所智能红外感知重点实验室, 上海 200083

联系人作者:陈凡胜(cfs@mail.sitp.ac.cn)

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引用该论文

Zhuoyue Hu,Xiaodong Zhou,Yujun Tang,Fansheng Chen. Measurement and Resolution Method for Intra-Pixel Response of Front-Illuminated CMOS Sensors[J]. Chinese Journal of Lasers, 2019, 46(9): 0910002

胡琸悦,周晓东,唐玉俊,陈凡胜. 一种前照式CMOS探测器像元内响应测量和解算方法[J]. 中国激光, 2019, 46(9): 0910002

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