光学学报, 2020, 40 (14): 1405002, 网络出版: 2020-07-23
基于亚波长光栅的高集成度垂直光耦合器 下载: 1005次
Ultra-Compact Vertical Optical Coupler Based on Subwavelength Grating
光栅 亚波长结构 耦合器 亚波长光栅 异质集成 gratings subwavelength structure coupler subwavelength grating heterogeneous integration
摘要
设计了一种基于亚波长光栅的具有高集成度、高耦合效率的垂直光耦合器,在1.5~1.6 μm波长范围内实现了大于97%的耦合效率,且器件长度仅为15 μm,是传统基于绝热拉锥波导的垂直耦合器尺寸的十分之一,提高了系统的集成度。在亚波长光栅占空比、拉锥波导尖端尺寸以及波导错位方面,所设计的耦合器均具有较大的工艺误差容限,在异质集成领域展现出了良好的应用前景。
Abstract
A vertical optical coupler with high integration and coupling efficiency is designed based on a subwavelength grating. The proposed vertical coupler shows the coupling efficiency above 97% within the wavelength range of 1.5--1.6 μm. Moreover, the length of the device is only 15 μm, which is one tenth of the size of the traditional vertical coupler based on an adiabatic tapered waveguide and improves the integration of the system. In terms of duty ratio of subwavelength grating, tip size of tapered waveguide and dislocation of waveguide, the designed couplers have large tolerances to process errors, which shows a good application prospect in the field of heterogeneous integration.
赵然, 孙崇磊, 徐晓, 赵佳. 基于亚波长光栅的高集成度垂直光耦合器[J]. 光学学报, 2020, 40(14): 1405002. Ran Zhao, Chonglei Sun, Xiao Xu, Jia Zhao. Ultra-Compact Vertical Optical Coupler Based on Subwavelength Grating[J]. Acta Optica Sinica, 2020, 40(14): 1405002.