Photonics Research, 2020, 8 (5): 05000677, Published Online: Apr. 22, 2020
Laser trimming of the operating wavelength of silicon nitride racetrack resonators Download: 638次
Abstract
We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet laser. The results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral range. This process is much faster than similar, previously presented methods (in the order of seconds, compared to hours). This technique can also be applied to accurately trim the optical performance of any other silicon photonic device based on nitrogen-rich silicon nitride.
Greta De Paoli, Senta L. Jantzen, Thalia Dominguez Bucio, Ilias Skandalos, Christopher Holmes, Peter G. R. Smith, Milan M. Milosevic, Frederic Y. Gardes. Laser trimming of the operating wavelength of silicon nitride racetrack resonators[J]. Photonics Research, 2020, 8(5): 05000677.