Metasurface-based subtractive color filter fabricated on a 12-inch glass wafer using a CMOS platform [Cover Paper]
Optical color filters are widely applied in many areas including display, imaging, sensing, holography, energy harvest, and measurement. Traditional dye-based color filters have drawbacks such as environmental hazards and instability under high temperature and ultraviolet radiation. With advances in nanotechnology, structural color filters, which are based on the interaction of light with designed nanostructures, are able to overcome the drawbacks. Also, it is possible to fabricate structural color filters using standard complementary metal-oxide-semiconductor (CMOS) fabrication facilities with low cost and high volume. In this work, metasurface-based subtractive color filters (SCFs) are demonstrated on 12-inch (300-mm) glass wafers using a CMOS-compatible fabrication process. In order to make the transmissive-type SCF on a transparent glass wafer, an in-house developed layer transfer process is used to solve the glass wafer handling issue in fabrication tools. Three different heights of embedded silicon nanopillars (110, 170, and 230 nm) are found to support magnetic dipole resonances. With pillar height and pitch variation, SCFs with different displayed colors are achieved. Based on the resonance wavelength, the displayed color of the metasurface is verified within the red-yellow-blue color wheel. The simulation and measurement results are compared and discussed. The work provides an alternative design for high efficiency color filters on a CMOS-compatible platform, and paves the way towards mass-producible large-area metasurfaces.
基金项目：Agency for Science, Technology and Research
Nanxi Li：Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
Yuan Dong：Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
Yuan Hsing Fu：Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
Ting Hu：Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
Qize Zhong：Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
Yanyan Zhou：Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
Dongdong Li：Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
Shiyang Zhu：Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
Navab Singh：Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore 138634, Singapore
备注：Agency for Science, Technology and Research
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Zhengji Xu, Nanxi Li, Yuan Dong, Yuan Hsing Fu, Ting Hu, Qize Zhong, Yanyan Zhou, Dongdong Li, Shiyang Zhu, and Navab Singh, "Metasurface-based subtractive color filter fabricated on a 12-inch glass wafer using a CMOS platform," Photonics Research 9(1), 13-20 (2021)