液晶空间光调制器(LCSLM)在非显示领域有着广泛的应用。利用夏克哈特曼波前探测器对LCSLM的相位调制特性进行测量,结果表明,低阶Zernike模式的线性相位调制范围相对较大,随着调制范围的增加,衍射效率下降明显。对LCSLM用于非球面面形测量的可能性进行初步探讨,为扩展非球面面形检测方法提供一种全新的思路。

A liquid crystal spatial light modulator (LCSLM) has a wide range of applications in the non-display field. In this study, the phase modulation characteristics of LCSLM are evaluated using a Shack-Hartmann wavefront detector. The results denote that the linear phase modulation range of the low-order Zernike mode is relatively large, and the diffraction efficiency significantly decreases as the modulation range increases. Furthermore, the possibility of using LCSLM for performing aspherical surface measurements is discussed, which provides a new approach for expanding the method of aspheric surface shape detection.