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Fabrication of diamond ultra-fine structures by femtosecond laser

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Abstract

A 400 nm femtosecond laser was used to ablate the surface of a high-pressure and high-temperature diamond, and subwavelength surface micro structures with a period of 100 nm were achieved. A variety of micro-nano composite surface structures were prepared by changing the polarization direction and laser scanning direction. By dynamically adjusting the laser polarization and the laser scanning tracks, a maskless direct writing fabrication of micro-nano complex structures was realized. The micro-nano patterning on an ultra-hard and super-stabile diamond provides a new idea for the preparation of friction reducing surfaces, nano imprint transfer templates, surface enhanced Raman scattering test substrates, and micro-nano optical structures.

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DOI:10.3788/COL202018.101402

所属栏目:Lasers and Laser Optics

基金项目:This work was supported by the National Natural Science Foundation of China (NSFC) (Nos. 61590930, 61805098, 61827826, and 91860140) and the Postdoctoral Science Foundation of China (No. 2019M651200).

收稿日期:2020-06-11

录用日期:2020-06-28

网络出版日期:2020-08-28

作者单位    点击查看

姜瞳:College of Physics, Jilin University, Changchun 130012, China
高斯:State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
田振男:College of Physics, Jilin University, Changchun 130012, China;State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
张汉壮:College of Physics, Jilin University, Changchun 130012, China
牛立刚:State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

联系人作者:牛立刚(niulg@jlu.edu.cn)

备注:This work was supported by the National Natural Science Foundation of China (NSFC) (Nos. 61590930, 61805098, 61827826, and 91860140) and the Postdoctoral Science Foundation of China (No. 2019M651200).

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引用该论文

Tong Jiang, Si Gao, Zhennan Tian, Hanzhuang Zhang, Ligang Niu, "Fabrication of diamond ultra-fine structures by femtosecond laser," Chinese Optics Letters 18(10), 101402 (2020)

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