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一种高精细度MEMS光纤F-P压力传感器

A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS

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摘要

提出并通过实验研究了一种高精细度微机电系统(MEMS)光纤法布里-珀罗(F-P)压力传感器。该传感器基于MEMS技术,将硅片与Pyrex#7740玻璃片阳极键合并镀上高反介质膜构成一个高精细度的F-P腔。当外界压力发生变化时,F-P腔长会发生变化;采用高灵敏度光纤白光干涉测量技术,通过测量F-P腔长就可获得被测压力。实验结果表明,该传感器压力测量分辨率高,线性度高,并具有低温漂特性。

Abstract

In this paper, a high-fineness optical fiber Fabry-Perot (F-P) pressure sensor based on micro-electro-mechanical system (MEMS) is proposed and experimentally demonstrated. The sensor is a high-fineness F-P interferometer formed by a silicon diaphragm and a Pyrex#7740 glass sheet both coated with high-reflection film. The change of pressure causes the length change of F-P cavity. Thus, based on the high-sensitive optical fiber white light interferometry, the pressure can be obtained by measuring the cavity length of the F-P. Experimental results show that the pressure sensor has properties of good measurement resolution, high linearity and low temperature drift characteristics.

Newport宣传-MKS新实验室计划
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DOI:10.3788/LOP56.170625

所属栏目:功能光纤

基金项目:国家自然科学基金、国家重点研发计划、国家高技术研究发展计划;

收稿日期:2019-03-22

修改稿日期:2019-04-25

网络出版日期:2019-09-01

作者单位    点击查看

张韬杰:北京理工大学光电学院, 北京 100081
江毅:北京理工大学光电学院, 北京 100081
马维一:北京理工大学光电学院, 北京 100081

联系人作者:张韬杰, 江毅(zhangtaojie958@foxmail.com, bitjy@bit.deu.cn)

备注:国家自然科学基金、国家重点研发计划、国家高技术研究发展计划;

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引用该论文

Taojie Zhang, Yi Jiang, Weiyi Ma. A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS[J]. Laser & Optoelectronics Progress, 2019, 56(17): 170625

张韬杰, 江毅, 马维一. 一种高精细度MEMS光纤F-P压力传感器[J]. 激光与光电子学进展, 2019, 56(17): 170625

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