光学学报, 2020, 40 (12): 1205002, 网络出版: 2020-06-03
高衍射效率短波红外凸面闪耀光栅的研制与应用 下载: 1411次
Development and Application of Shortwave Infrared Convex Blazed Grating with High Diffraction Efficiency
光栅 成像光谱 凸面光栅 衍射效率 超精密加工 短波红外 gratings imaging spectrometry convex grating diffraction efficiency ultra-precision machining short wave infrared
摘要
利用矢量衍射理论,对矩形槽型光栅和三角槽型光栅分别进行衍射效率分析,结果表明三角槽型光栅的衍射效率比矩形槽型光栅高出1倍左右。基于五轴超精密单点金刚石车床切削工艺,计算了金刚石刀头移动误差、移动间隔标准偏差范围、光栅刻线位置的加工偏差,并分析了刀头磨损对光栅衍射效率的影响。在此基础上,成功研制了曲率半径为70 mm、刻线密度为60 line/mm、直径为52 mm的凸面闪耀光栅,在1000~2500 nm光谱范围内,其最大相对衍射效率大于80%,平均相对衍射效率大于60%。实际飞行高光谱数据表明,基于该光栅研制的短波红外成像光谱仪满足地质遥感技术要求。
Abstract
In this study, the diffraction efficiency analysis of a rectangular groove grating and a triangular groove grating was performed using the vector diffraction theory. Accordingly, the diffraction efficiency of the triangular groove grating was found to be about one time higher than that of the rectangular groove grating. Based on a new five-axis ultra-precision single-point diamond lathe cutting technique, the diamond tool-head movement errors, the movement spacing standard deviation range and the machining deviation of grating line position are determined and the effect of tool-head wear on grating diffraction efficiency was also analyzed. On this basis, a convex blazed grating with curvature radius of 70 mm, groove density of 60 line/mm, and diameter of 52 mm was developed. And the peak relative diffraction efficiency is larger than 80% and the average relative diffraction efficiency is larger than 60% in the 1000-2500 nm spectral region. The actual hyperspectral data obtained during the flight shows that the shortwave infrared imaging spectrometer developed using the proposed convex grating meets the requirements of geological remote-sensing technology.
郑志忠, 杨忠, 修连存. 高衍射效率短波红外凸面闪耀光栅的研制与应用[J]. 光学学报, 2020, 40(12): 1205002. Zhizhong Zheng, Zhong Yang, Liancun Xiu. Development and Application of Shortwave Infrared Convex Blazed Grating with High Diffraction Efficiency[J]. Acta Optica Sinica, 2020, 40(12): 1205002.