激光与光电子学进展, 2019, 56 (20): 202415, 网络出版: 2019-10-22
等离激元光电探测器的光吸收特性研究 下载: 1104次
Light Absorption Characteristics of Plasmonic Photodetectors
摘要
基于有限元法建立三维(3D)数学模型,计算硅薄膜光电探测器表面周期性分布的Ag纳米颗粒阵列对光电探测器光吸收性能的影响。结果表明对于球状Ag纳米颗粒阵列,阵列周期P与粒子直径d的比值是影响硅薄膜光吸收效率的关键因素。当硅衬底顶部粒子排布较密(P与d的比值较小)时,与裸硅光电探测器相比,等离激元光电探测器在不同入射角度下的光吸收效率都有不同程度的提高,其中在波长为700 nm、入射角度范围为0°~65°时,光吸收效率从5%提升到65%,整个波段范围内光电转换效率从29%增强为34%。
Abstract
We establish a three-dimensional (3D) mathematical model based on the finite element method and calculate the effect of the Ag nanoparticle arrays that are periodically distributed on the surface of the silicon thin-film photodetector on its light absorption performance. The results denote that, for the spherical Ag particle arrays, the key parameter affecting the light absorption efficiency of the silicon film is the ratio of the period to particle diameter. When the top particles of the silicon substrate are densely packed (i.e., when the ratio P/d is small), the absorption efficiency of the plasmon photodetector is improved to different extents at different incident angles when compared with that of the bare silicon photodetector. The absorption efficiency increases from 5% to 65% at the wavelength of 700 nm with the incident angle ranging from 0° to 65°. Furthermore, the photoelectric conversion efficiency increases from 29% to 34% over the entire wavelength range.
柯熙政, 周茹. 等离激元光电探测器的光吸收特性研究[J]. 激光与光电子学进展, 2019, 56(20): 202415. Xizheng Ke, Ru Zhou. Light Absorption Characteristics of Plasmonic Photodetectors[J]. Laser & Optoelectronics Progress, 2019, 56(20): 202415.