激光与光电子学进展, 2020, 57 (15): 151202, 网络出版: 2020-08-04
基于振动节点优化提高双频激光干涉仪的测量精度 下载: 883次
Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization
测量 干涉仪 测量精度 振型节点 频率响应函数 measurement interferometry measurement accuracy modal node frequency response function
摘要
双频激光干涉仪在纳米测量技术领域中的应用十分广泛,在特定的使用环境中,如何减小测量系统存在的误差,提高系统的测量精度变得越来越重要。鉴于此,提出一种利用测量环境中的振型节点减小环境振动,提高双频激光干涉仪测量精度的方法。先从理论的角度分析该方案的可行性,基于此理论搭建实验测量系统,再利用加速度传感器找到测量系统中的节点位置,最后测试双频激光干涉仪在振型节点位置和其他非节点位置处的测量重复性水平。实验结果表明:当外界存在振源时,所提方法在非振型节点位置的测量重复性为±9 nm,振型节点位置的测量重复性为±4 nm,即节点位置处双频激光干涉仪的测量精度相对非节点位置提高了125%,证明了该方法的有效性。
Abstract
Dual-frequency laser interferometers are widely used in the field of nanometer measurement. Particular usage context, reducing the errors in a measurement system and improving the measurement accuracy of the system becomes increasingly important. Accordingly, a method is proposed herein to use the vibration modal nodes in the measurement environment to reduce environmental vibrations and improve the measurement accuracy of a dual-frequency laser interferometer. First, the feasibility of the scheme is analyzed from a theoretical perspective, and the experimental measurement system is built based on this theory. Then, the node position in the measurement system is found by using an acceleration sensor. Finally, the measurement repeatability of the dual-frequency laser interferometer in the modal node position and other non-modal node positions are tested. Experimental results show that when there is an external vibration source, the measurement repeatability of the proposed method in the non-modal node position is ±9 nm, and that of the modal node position is ±4 nm. Thus, the measurement accuracy of the dual-frequency laser interferometer in the node position is 125% higher than that in the non-modal node position, which confirms the effectiveness of this method.
于海娇, 赵国罡. 基于振动节点优化提高双频激光干涉仪的测量精度[J]. 激光与光电子学进展, 2020, 57(15): 151202. Haijiao Yu, Guogang Zhao. Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization[J]. Laser & Optoelectronics Progress, 2020, 57(15): 151202.